Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Tegal Receives Order for Aluminum Nitride Deposition System From the University of Pennsylvania

Abstract:
Begins New Initiatives for Laboratory Research Support and AlN Foundry Services

Tegal Receives Order for Aluminum Nitride Deposition System From the University of Pennsylvania

San Jose, CA | Posted on June 14th, 2007

Tegal Corporation (NASDAQ:TGAL), a leading designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits, MEMS, and nanotechnology devices, today announced that it has received an order for a Tegal AMS SMT™ AlN PVD tool from the University of Pennsylvania. The Tegal AMS SMT™ system will be installed in the University of Pennsylvania Wolf Nanofabrication Laboratory, where it will be used by Professor Gianluca Piazza and his group for research on piezoelectric micro and nano systems (MEMS/NEMS) for the realization of next-generation RF Wireless Communication, Biological Detection, Wireless Sensor Platform, and Medical Ultrasound applications.

According to Professor Piazza, "We think we've found the best fit, with this small footprint tool, to meet our laboratory needs for reliably depositing highly oriented piezoelectric aluminum nitride films. We are confident our research work with these AlN films will produce enabling technology for the realization of new classes of micro and nanomechanical resonators, filters, switches and precision actuators. These AlN-based devices have applications in several different areas, such as analog frequency processing, mechanical computing, and biochemical sensing."

"With the addition of the AMS SMT™ and MMT™ PVD systems earlier this year, Tegal now offers and supports the broadest product line, and largest installed base, of AlN PVD tools in the world," said Thomas Mika, President & CEO of Tegal Corporation. "The Tegal AMS™ and Endeavor™ AlN PVD S-Gun™ magnetron source is the cornerstone of commercial RF MEMS fabrication today, and is being used in FBAR production and research facilities across the world to develop the MEMS products of tomorrow. Additionally, along with providing new PVD tools for users investigating fundamental thin film properties and applications, like Prof. Piazza's group at Penn, Tegal also offers a low cost foundry service for BAW/FBAR researchers, at our applications lab in San Jose, that enables quick-turn deposition of highly oriented AlN films for the development of novel MEMS devices."

Professor Piazza received his Ph.D. from the University of California, Berkeley, in Fall 2005 and currently works in the Department of Electrical and Systems Engineering at the University of Pennsylvania. While at Berkeley, he developed a new class of AlN contour-mode vibrating microstructures for RF communications. Prof. Piazza holds two patents in the field of micromechanical resonators, and is co-founder of a start-up, Harmonic Devices, Inc., aiming at the commercialization of single-chip and multi-band RF filters and oscillators.

The Tegal AMS™ systems offer state-of-the-art PVD and reactive sputtering of aluminum nitride (AlN) films for piezoelectric devices such as BAW and FBAR filters. The acquisition of the AMS platform in 2007 represents Tegal's most recent product offering for MEMS device research and manufacturing. The Tegal AMS™ systems feature a unique implementation of the dual cathode S-Gun™ magnetron source specifically optimized for the most demanding film thickness uniformity specifications in the PVD industry (< 1.5% 3 sigma). The AlN reactive sputtering module can be configured as a low-cost, stand-alone system for basic thin film research in the Tegal AMS SMT™ tool, or fully integrated for device production with one or two additional PVD modules for Molybdenum (Mo) or other electrode materials in the Tegal AMS MMT™ cluster tool.

Safe Harbor Statement

Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.

####

About Tegal Corporation
Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor, MEMS, and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal’s system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.

For more information, please click here

Contacts:


Tegal Corporation
Paul Werbaneth
707-763-5600
Director – Strategic Projects
or
The Blue Shirt Group
Rakesh Mehta
415-217-7722

Chris Danne
415-217-7722

Copyright © Business Wire 2007

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

NEMS

LetiDays Grenoble to Present Multiple Perspectives on Development, Challenges and Markets for the IoT April 14th, 2014

Columbia engineers make world's smallest FM radio transmitter: Team demonstrates new application of graphene using positive feedback November 18th, 2013

Revisiting quantum effects in MEMS: New calculations shows that the influence of quantum effects on the operating conditions of nanodevices has, until now, been overestimated November 15th, 2013

Leti Workshop at IEDM 2013 Will Present Latest Advances in Cost-effective and Power-efficient Technologies for the Future of the Semiconductor Industry November 6th, 2013

MEMS

LetiDays Grenoble to Present Multiple Perspectives on Development, Challenges and Markets for the IoT April 14th, 2014

Rainbow-catching waveguide could revolutionize energy technologies: By slowing and absorbing certain wavelengths of light, engineers open new possibilities in solar power, thermal energy recycling and stealth technology March 28th, 2014

Micro systems with big commercial potential featured in SPIE journal: Special section in Journal of Micro/Nanolithography, MEMS, and MOEMS highlights emerging MOEMS technologies March 25th, 2014

Martini Tech Inc. Starts to Offer GaN Deposition Service by MOCVD March 25th, 2014

Sensors

University of Tehran Researchers Invent Non-Enzyme Sensor to Detect Blood Sugar April 23rd, 2014

Iranian Researchers Present New Model to Strengthen Superconductivity at Higher Temperatures April 19th, 2014

Transparent Conductive Films and Sensors Are Hot Segments in Printed Electronics: Start-ups in these fields show above-average momentum, while companies working on emissive displays such as OLED are fading, Lux Research says April 17th, 2014

Biologists Develop Nanosensors to Visualize Movements and Distribution of Plant Stress Hormone April 15th, 2014

Tools

Characterizing inkjet inks: Malvern Instruments presents new rheological research April 23rd, 2014

MRI, on a molecular scale: Researchers develop system that could one day peer into the atomic structure of individual molecules April 20th, 2014

Oxford Instruments Asylum Research Introduces the MFP-3D InfinityTM AFM Featuring Powerful New Capabilities and Stunning High Performance April 18th, 2014

More effective kidney stone treatment, from the macroscopic to the nanoscale April 17th, 2014

New-Contracts/Sales/Customers

Industrial Nanotech, Inc. Lands First Major Order from Pemex, Mexico’s State-Owned Oil and Gas Company April 14th, 2014

TED Selects Nanotech for Branding and Security on 30th Anniversary Conferences: Nanotech and TED collaborate to create a custom security feature using nano-imaging March 17th, 2014

Simon Fraser University Completes Installation of Electron Microscopes from FEI: SFU’s new multi-million-dollar Centre for Soft Materials now offers the most advanced suite of microscopes in Western Canada March 11th, 2014

Arrowhead Receives Regulatory Approval to Begin Phase 2a Trial of Chronic Hepatitis B Candidate ARC-520 March 3rd, 2014

RFID

Leti and Partners in SOCRATE Project Focusing on Miniature Antennas with Super-Directivity Radiation Properties: Improving Directivity of Small Antennas Would Enhance Spectral Efficiency, Reduce Environmental Impact and Increase Functionality July 15th, 2013

IDTechEx launches online Market Intelligence Portal May 23rd, 2013

Mincom Capital Inc. and Group Nanoxplore Inc. Sign Letter of Intent for a Qualifying Transaction April 10th, 2013

SouthWest NanoTechnologies Featuring Carbon Nanotube Inks at 2013 Flexible Electronics and Displays Conference (FlexTech) (Booth 48) January 30th, 2013

NanoNews-Digest
The latest news from around the world, FREE







  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE