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Home > Press > Tegal Receives Order for Aluminum Nitride Deposition System From the University of Pennsylvania

Begins New Initiatives for Laboratory Research Support and AlN Foundry Services

Tegal Receives Order for Aluminum Nitride Deposition System From the University of Pennsylvania

San Jose, CA | Posted on June 14th, 2007

Tegal Corporation (NASDAQ:TGAL), a leading designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits, MEMS, and nanotechnology devices, today announced that it has received an order for a Tegal AMS SMT™ AlN PVD tool from the University of Pennsylvania. The Tegal AMS SMT™ system will be installed in the University of Pennsylvania Wolf Nanofabrication Laboratory, where it will be used by Professor Gianluca Piazza and his group for research on piezoelectric micro and nano systems (MEMS/NEMS) for the realization of next-generation RF Wireless Communication, Biological Detection, Wireless Sensor Platform, and Medical Ultrasound applications.

According to Professor Piazza, "We think we've found the best fit, with this small footprint tool, to meet our laboratory needs for reliably depositing highly oriented piezoelectric aluminum nitride films. We are confident our research work with these AlN films will produce enabling technology for the realization of new classes of micro and nanomechanical resonators, filters, switches and precision actuators. These AlN-based devices have applications in several different areas, such as analog frequency processing, mechanical computing, and biochemical sensing."

"With the addition of the AMS SMT™ and MMT™ PVD systems earlier this year, Tegal now offers and supports the broadest product line, and largest installed base, of AlN PVD tools in the world," said Thomas Mika, President & CEO of Tegal Corporation. "The Tegal AMS™ and Endeavor™ AlN PVD S-Gun™ magnetron source is the cornerstone of commercial RF MEMS fabrication today, and is being used in FBAR production and research facilities across the world to develop the MEMS products of tomorrow. Additionally, along with providing new PVD tools for users investigating fundamental thin film properties and applications, like Prof. Piazza's group at Penn, Tegal also offers a low cost foundry service for BAW/FBAR researchers, at our applications lab in San Jose, that enables quick-turn deposition of highly oriented AlN films for the development of novel MEMS devices."

Professor Piazza received his Ph.D. from the University of California, Berkeley, in Fall 2005 and currently works in the Department of Electrical and Systems Engineering at the University of Pennsylvania. While at Berkeley, he developed a new class of AlN contour-mode vibrating microstructures for RF communications. Prof. Piazza holds two patents in the field of micromechanical resonators, and is co-founder of a start-up, Harmonic Devices, Inc., aiming at the commercialization of single-chip and multi-band RF filters and oscillators.

The Tegal AMS™ systems offer state-of-the-art PVD and reactive sputtering of aluminum nitride (AlN) films for piezoelectric devices such as BAW and FBAR filters. The acquisition of the AMS platform in 2007 represents Tegal's most recent product offering for MEMS device research and manufacturing. The Tegal AMS™ systems feature a unique implementation of the dual cathode S-Gun™ magnetron source specifically optimized for the most demanding film thickness uniformity specifications in the PVD industry (< 1.5% 3 sigma). The AlN reactive sputtering module can be configured as a low-cost, stand-alone system for basic thin film research in the Tegal AMS SMT™ tool, or fully integrated for device production with one or two additional PVD modules for Molybdenum (Mo) or other electrode materials in the Tegal AMS MMT™ cluster tool.

Safe Harbor Statement

Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.


About Tegal Corporation
Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor, MEMS, and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal’s system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.

For more information, please click here


Tegal Corporation
Paul Werbaneth
Director – Strategic Projects
The Blue Shirt Group
Rakesh Mehta

Chris Danne

Copyright © Business Wire 2007

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