Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Tegal Receives Order for Endeavor AT™ PVD Tool From Top-Tier MEMS Foundry

Abstract:
Volume Production by ISO 9001 -2000 Certified MEMS Foundry Targeted at High-Growth MEMS Markets

Tegal Receives Order for Endeavor AT™ PVD Tool From Top-Tier MEMS Foundry

SAN JOSE, CA | Posted on June 7th, 2007

Tegal Corporation (Nasdaq:TGAL), a leading designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits, MEMS, and nanotechnology devices, today announced it had received an order for an Endeavor AT™ PVD cluster tool from a top-tier MEMS foundry located in Europe. The Endeavor system will be installed in the customer's recently-expanded 150mm MEMS fab, and will be used to produce MEMS devices for the telecommunication, automotive, biomedical, and consumer electronic markets.

"The Endeavor PVD system was selected by our customer on the basis of the Endeavor's production track record, its versatility, and on the quality of the films that the Endeavor AT™ produces," said Thomas Mika, President & CEO of Tegal Corporation. "Tegal's MEMS customers, like this major MEMS foundry, are investing in expanded production capacity to support the surging demand for MEMS devices in applications such as cell phone handset silicon microphones, where unit shipments are expected to double, from 300M to 600M yearly, by 2009. Our Endeavor AT™ system was purchased to support these commercial MEMS fabrication needs."

The Tegal Endeavor AT™ system is a state-of the-art, ultra-high vacuum PVD cluster tool used in production fabs to deposit consistent, high purity films, with low to zero stress values, in an extremely clean process environment. These films are widely utilized in under-bump metallization applications, advanced packaging, power devices, photo masks (including EUV), high-brightness light emitting diodes (HB-LEDs), and in creating electro-acoustic devices for FBARs and RF MEMS. The Endeavor AT™ has an easy-to-use GUI, SECS/GEM communication, reliable low-contact wafer handling, and flexible wafer shape and size capability, that makes it ideal for ultra-clean production environments for both front-side and back-side applications. Optional damage-free soft-etch modules, and a variety of RF magnetron configurations, are available to sputter many different dielectric and conductive films used in semiconductor, MEMS, and other electronic device production.

Safe Harbor Statement

Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.

####

About Tegal Corporation
Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor, MEMS, and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal’s system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.

For more information, please click here

Contacts:
Tegal Corporation
Murali Narasimhan, 707-763-5600
Vice President – Marketing
or
The Blue Shirt Group
Rakesh Mehta, 415-217-7722
Chris Danne, 415-217-7722

Copyright © Business Wire 2007

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

MEMS

CNSE's Smart System Technology & Commercialization Center Successfully Recertifies as ISO 9001:2008 January 12th, 2015

Piezoelectricity in a 2-D semiconductor: Berkeley Lab researchers discovery of piezoelectricty in molybdenum disulfide holds promise for future MEMS December 22nd, 2014

MEMS Industry Group's 10th Annual Executive Conference Showcases Rapid Innovation in MEMS/Sensors: Emphasizes Spirit of Collaboration, Supporting First Open-Source Algorithm Community, New Standardization Efforts November 10th, 2014

MEMS & Sensors Technology Showcase: Finalists Announced for MEMS Executive Congress US 2014 October 23rd, 2014

Announcements

New method allows for greater variation in band gap tunability: The method can change a material's electronic band gap by up to 200 percent January 31st, 2015

Evidence mounts for quantum criticality theory: Findings bolster theory that quantum fluctuations drive strange electronic phenomena January 30th, 2015

Everything You Need To Know About Nanopesticides January 30th, 2015

DNA nanoswitches reveal how life's molecules connect: An accessible new way to study molecular interactions could lower cost and time associated with discovering new drugs January 30th, 2015

Tools

Hiden Gas Analysers at PITTCON 2015 | Visit us on Booth No. 1127 January 29th, 2015

Advantest to Exhibit at SEMICON Korea in Seoul, South Korea February 4-6 Showcasing Broad Portfolio of Semiconductor Products, Technologies and Solutions January 29th, 2015

Park Systems Announces Innovations in Bio Cell Analysis with the Launch of Park NX-Bio, the only 3-in-1 Imaging Nanoscale Tool Available for Life Science Researchers January 29th, 2015

2015 Nanonics Image Contest January 29th, 2015

New-Contracts/Sales/Customers

The Original Frameless Shower Doors Installs DFI's FuseCube™ to Offer Hydrophobic Protective Coating as a Standard Feature: First DFI FuseCube™ Installed on the East Coast to Enable Key Differentiator for the Original Frameless Shower Doors January 29th, 2015

Industrial Nanotech, Inc. Announces New OEM Customer January 27th, 2015

DELMIC reports on applications of their SPARC technology at the Chalmers University of Technology in Gothenburg, Sweden December 16th, 2014

Industrial Nanotech, Inc. Expands Government and Defense Projects December 10th, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2015 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE