Home > Press > Tegal Receives Order for Endeavor AT™ PVD Tool From Top-Tier MEMS Foundry
Volume Production by ISO 9001 -2000 Certified MEMS Foundry Targeted at High-Growth MEMS Markets
Tegal Receives Order for Endeavor AT™ PVD Tool From Top-Tier MEMS Foundry
SAN JOSE, CA | Posted on June 7th, 2007
Tegal Corporation (Nasdaq:TGAL), a leading designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits, MEMS, and nanotechnology devices, today announced it had received an order for an Endeavor AT™ PVD cluster tool from a top-tier MEMS foundry located in Europe. The Endeavor system will be installed in the customer's recently-expanded 150mm MEMS fab, and will be used to produce MEMS devices for the telecommunication, automotive, biomedical, and consumer electronic markets.
"The Endeavor PVD system was selected by our customer on the basis of the Endeavor's production track record, its versatility, and on the quality of the films that the Endeavor AT™ produces," said Thomas Mika, President & CEO of Tegal Corporation. "Tegal's MEMS customers, like this major MEMS foundry, are investing in expanded production capacity to support the surging demand for MEMS devices in applications such as cell phone handset silicon microphones, where unit shipments are expected to double, from 300M to 600M yearly, by 2009. Our Endeavor AT™ system was purchased to support these commercial MEMS fabrication needs."
The Tegal Endeavor AT™ system is a state-of the-art, ultra-high vacuum PVD cluster tool used in production fabs to deposit consistent, high purity films, with low to zero stress values, in an extremely clean process environment. These films are widely utilized in under-bump metallization applications, advanced packaging, power devices, photo masks (including EUV), high-brightness light emitting diodes (HB-LEDs), and in creating electro-acoustic devices for FBARs and RF MEMS. The Endeavor AT™ has an easy-to-use GUI, SECS/GEM communication, reliable low-contact wafer handling, and flexible wafer shape and size capability, that makes it ideal for ultra-clean production environments for both front-side and back-side applications. Optional damage-free soft-etch modules, and a variety of RF magnetron configurations, are available to sputter many different dielectric and conductive films used in semiconductor, MEMS, and other electronic device production.
Safe Harbor Statement
Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.
About Tegal Corporation
Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor, MEMS, and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal’s system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.
For more information, please click here
Murali Narasimhan, 707-763-5600
Vice President – Marketing
The Blue Shirt Group
Rakesh Mehta, 415-217-7722
Chris Danne, 415-217-7722
Copyright © Business Wire 2007
If you have a comment, please Contact
Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.
MEMS/Sensors Drive IoT/E Innovation in Europe: MEMS Executive Congress Europe Speakers Explore Internet of Things/Everything in Automotive, Consumer, Industrial Markets, 9-10, March in Copenhagen February 9th, 2015
STMicroelectronics Leads European Research Project to Develop Next-Generation Optical MEMS: Extension to a project launched in 2013 builds on current efforts to enable technologies for next-generation applications February 4th, 2015
Entegris Launches Dispense System Optimized for 3D and MEMS Applications: New IntelliGen® MV system delivers process efficiencies and defect reduction in dispensing mid-viscosity fluids February 3rd, 2015
CNSE's Smart System Technology & Commercialization Center Successfully Recertifies as ISO 9001:2008 January 12th, 2015
Anousheh Ansari Wins the National Space Society's Space Pioneer Award for "Service to the Space Community" March 5th, 2015
Enhanced Graphene Components for Next Generation Racing Yacht March 5th, 2015
Get ready for NanoDays! March 5th, 2015
American Chemical Society Presidential Symposia: nanoscience, international chemistry March 5th, 2015
Keysight Technologies Shifts to Direct Sales of High-Performance Products in North America March 3rd, 2015
Forbidden quantum leaps possible with high-res spectroscopy March 2nd, 2015
International research partnership tricks the light fantastic March 2nd, 2015
Important step towards quantum computing: Metals at atomic scale March 2nd, 2015
United Nanotech Innovations Lists Materials for Trade on INSCX™ Exchange and Appoints Fullerex as Merchant February 17th, 2015
Virginia Tech Purchases Two Bruker Fluorescence Microscope Solutions: High-Speed Instruments Combine to Cover Wide Optical Resolution Range February 10th, 2015
Nano Labs Announces the Opportunity to Submit the POLEC Liquid Cement Product for Test Trials to Be Used in the Construction of the New International Airport of Mexico City (NAICM) February 2nd, 2015
The Original Frameless Shower Doors Installs DFI's FuseCube™ to Offer Hydrophobic Protective Coating as a Standard Feature: First DFI FuseCube™ Installed on the East Coast to Enable Key Differentiator for the Original Frameless Shower Doors January 29th, 2015