Nanotechnology Now





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Tegal Receives Order for Endeavor AT™ PVD Tool From Top-Tier MEMS Foundry

Abstract:
Volume Production by ISO 9001 -2000 Certified MEMS Foundry Targeted at High-Growth MEMS Markets

Tegal Receives Order for Endeavor AT™ PVD Tool From Top-Tier MEMS Foundry

SAN JOSE, CA | Posted on June 7th, 2007

Tegal Corporation (Nasdaq:TGAL), a leading designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits, MEMS, and nanotechnology devices, today announced it had received an order for an Endeavor AT™ PVD cluster tool from a top-tier MEMS foundry located in Europe. The Endeavor system will be installed in the customer's recently-expanded 150mm MEMS fab, and will be used to produce MEMS devices for the telecommunication, automotive, biomedical, and consumer electronic markets.

"The Endeavor PVD system was selected by our customer on the basis of the Endeavor's production track record, its versatility, and on the quality of the films that the Endeavor AT™ produces," said Thomas Mika, President & CEO of Tegal Corporation. "Tegal's MEMS customers, like this major MEMS foundry, are investing in expanded production capacity to support the surging demand for MEMS devices in applications such as cell phone handset silicon microphones, where unit shipments are expected to double, from 300M to 600M yearly, by 2009. Our Endeavor AT™ system was purchased to support these commercial MEMS fabrication needs."

The Tegal Endeavor AT™ system is a state-of the-art, ultra-high vacuum PVD cluster tool used in production fabs to deposit consistent, high purity films, with low to zero stress values, in an extremely clean process environment. These films are widely utilized in under-bump metallization applications, advanced packaging, power devices, photo masks (including EUV), high-brightness light emitting diodes (HB-LEDs), and in creating electro-acoustic devices for FBARs and RF MEMS. The Endeavor AT™ has an easy-to-use GUI, SECS/GEM communication, reliable low-contact wafer handling, and flexible wafer shape and size capability, that makes it ideal for ultra-clean production environments for both front-side and back-side applications. Optional damage-free soft-etch modules, and a variety of RF magnetron configurations, are available to sputter many different dielectric and conductive films used in semiconductor, MEMS, and other electronic device production.

Safe Harbor Statement

Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.

####

About Tegal Corporation
Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor, MEMS, and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal’s system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.

For more information, please click here

Contacts:
Tegal Corporation
Murali Narasimhan, 707-763-5600
Vice President – Marketing
or
The Blue Shirt Group
Rakesh Mehta, 415-217-7722
Chris Danne, 415-217-7722

Copyright © Business Wire 2007

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

MEMS

Robust new process forms 3-D shapes from flat sheets of graphene June 23rd, 2015

Slip sliding away: Graphene and diamonds prove a slippery combination June 10th, 2015

MEMS Industry Group Hosts Its First MEMS/Sensors Conference Session at Transducers 2015: MIG Speakers Will Explore Technology Transfer, Emerging MEMS/Sensors, Manufacturing Infrastructure and Process Technology, June 23 in Anchorage June 3rd, 2015

Janusz Bryzek Joins MEMS Industry Group to Lead New TSensors Division - New Division will Focus on Accelerating Development of Emerging Ultra-high Volume Sensors Supporting Abundance, mHealth and IoT May 14th, 2015

Announcements

A Stretchy Mesh Heater for Sore Muscles July 6th, 2015

BBC World Service to broadcast Forum discussion on graphene July 6th, 2015

Production of Zirconium Carbide Nanoparticles at Low Temperature without Thermal Operations July 5th, 2015

A 'movie' of ultrafast rotating molecules at a hundred billion per second: A quantum wave-like nature was successfully observed in rotating nitrogen molecules July 4th, 2015

Tools

A 'movie' of ultrafast rotating molecules at a hundred billion per second: A quantum wave-like nature was successfully observed in rotating nitrogen molecules July 4th, 2015

Clues to inner atomic life from subtle light-emission shifts: Hyperfine structure of light absorption by short-lived cadmium atom isotopes reveals characteristics of the nucleus that matter for high precision detection methods July 3rd, 2015

Nanometrics to Announce Second Quarter Financial Results on July 23, 2015 July 2nd, 2015

Ultra-stable JILA microscopy technique tracks tiny objects for hours July 1st, 2015

New-Contracts/Sales/Customers

Oxford Instruments’ TritonXL Cryofree dilution refrigerator selected for the Oxford NQIT Quantum Technology Hub project June 30th, 2015

Centre for Process Innovation pilots Beneq’s breakthrough roll-to-roll ALD system for moisture barrier films June 3rd, 2015

Argonne chooses Beneq’s TFS 500 Atomic Layer Deposition System: Modularity and flexibility make for a natural choice May 14th, 2015

New JEOL E-Beam Lithography System to Enhance Quantum NanoFab Capabilities May 6th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project