Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Tegal Receives Order for Endeavor AT™ PVD Tool From Top-Tier MEMS Foundry

Abstract:
Volume Production by ISO 9001 -2000 Certified MEMS Foundry Targeted at High-Growth MEMS Markets

Tegal Receives Order for Endeavor AT™ PVD Tool From Top-Tier MEMS Foundry

SAN JOSE, CA | Posted on June 7th, 2007

Tegal Corporation (Nasdaq:TGAL), a leading designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits, MEMS, and nanotechnology devices, today announced it had received an order for an Endeavor AT™ PVD cluster tool from a top-tier MEMS foundry located in Europe. The Endeavor system will be installed in the customer's recently-expanded 150mm MEMS fab, and will be used to produce MEMS devices for the telecommunication, automotive, biomedical, and consumer electronic markets.

"The Endeavor PVD system was selected by our customer on the basis of the Endeavor's production track record, its versatility, and on the quality of the films that the Endeavor AT™ produces," said Thomas Mika, President & CEO of Tegal Corporation. "Tegal's MEMS customers, like this major MEMS foundry, are investing in expanded production capacity to support the surging demand for MEMS devices in applications such as cell phone handset silicon microphones, where unit shipments are expected to double, from 300M to 600M yearly, by 2009. Our Endeavor AT™ system was purchased to support these commercial MEMS fabrication needs."

The Tegal Endeavor AT™ system is a state-of the-art, ultra-high vacuum PVD cluster tool used in production fabs to deposit consistent, high purity films, with low to zero stress values, in an extremely clean process environment. These films are widely utilized in under-bump metallization applications, advanced packaging, power devices, photo masks (including EUV), high-brightness light emitting diodes (HB-LEDs), and in creating electro-acoustic devices for FBARs and RF MEMS. The Endeavor AT™ has an easy-to-use GUI, SECS/GEM communication, reliable low-contact wafer handling, and flexible wafer shape and size capability, that makes it ideal for ultra-clean production environments for both front-side and back-side applications. Optional damage-free soft-etch modules, and a variety of RF magnetron configurations, are available to sputter many different dielectric and conductive films used in semiconductor, MEMS, and other electronic device production.

Safe Harbor Statement

Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.

####

About Tegal Corporation
Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor, MEMS, and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal’s system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.

For more information, please click here

Contacts:
Tegal Corporation
Murali Narasimhan, 707-763-5600
Vice President – Marketing
or
The Blue Shirt Group
Rakesh Mehta, 415-217-7722
Chris Danne, 415-217-7722

Copyright © Business Wire 2007

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

MEMS

Smart multi-layered magnetic material acts as an electric switch: New study reveals characteristic of islands of magnetic metals between vacuum gaps, displaying tunnelling electric current March 1st, 2017

Engineers shrink microscope to dime-sized device February 17th, 2017

Leti Coordinating Project to Adapt Obstacle-Detection Technology Used in Autonomous Cars for Portable and Wearable Systems: INSPEX to Combine Knowhow of Nine European Organizations to Create Portable and Wearable Spatial-Exploration Systems February 2nd, 2017

Manufacturing platform makes intricate biocompatible micromachines January 7th, 2017

Announcements

Atomic imperfections move quantum communication network closer to reality June 25th, 2017

Research accelerates quest for quicker, longer-lasting electronics: UC Riverside-led research makes topological insulators magnetic well above room temperatures June 25th, 2017

U.S. Air Force Research Lab Taps IBM to Build Brain-Inspired AI Supercomputing System: Equal to 64 million neurons, new neurosynaptic supercomputing system will power complex AI tasks at unprecedented speed and energy efficiency June 23rd, 2017

Rice U. chemists create 3-D printed graphene foam June 22nd, 2017

Tools

Researchers developed nanoparticle based contrast agent for dual modal imaging of cancer June 21st, 2017

Oxford Instruments congratulates Lancaster University for inaugurating the IsoLab, built for studying quantum systems June 20th, 2017

Changing the color of laser light on the femtosecond time scale: How BiCoO3 achieves second harmonic generation June 14th, 2017

Leti Announces Two New Tools for Improving Transportation Comfort, Safety and Efficiency: Wearable Device Measures Stress Responses for Travelers, Pilots and Truck Drivers, While Smartphone App Provides Transit Agencies Broad Data on Transport Modes June 13th, 2017

New-Contracts/Sales/Customers

Park Systems Introduces Park NX12 for Unsurpassed Affordable High Resolution NanoScale Imaging Required for Advanced Analytical Chemistry, Materials Research, and Multi-User Facility June 5th, 2017

UnitySC Announces Wafer Thinning Inspection System; Win from Power Semiconductor IDM for Automotive: Leading IDM Selects New 4See Series Automated Defect Inspection Platform for Power Semiconductor Automotive Applications May 11th, 2017

JPK selects compact tensile stage from Deben for their NanoWizard® AFM platform to broaden capabilities for materials characterisation February 22nd, 2017

Cetim Facility Receives Bruker Contour CMM Dimensional Analysis System: New Optical Coordinate Measurement Technology Enables High-Precision 3D Scanning November 16th, 2016

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project