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Home > Press > Tegal Ships 901ACS Plasma Etch System to Leading High Brightness LED Manufacturer

Follow-on sale to support opto-semiconductor and HB-LED production ramp

Tegal Ships 901ACS Plasma Etch System to Leading High Brightness LED Manufacturer

San Jose, CA | Posted on June 5th, 2007

Tegal Corporation (NASDAQ: TGAL), a leading designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits, MEMS, and nanotechnology devices, today announced that it has shipped an additional 901ACS unit to a leading opto-semiconductor / LED manufacturer to support capacity expansion for lighting and optical sensor device production. The new Tegal 901ACS system adds to the customer's existing installed base of 900 Series etch systems.

Murali Narasimhan, Vice President - Marketing of Tegal Corporation, said: "High Brightness LEDs are widely recognized as being innovative light sources compatible with the green future, offering the important energy conservation benefits of low power consumption and low thermal output. Additionally, the compact dimensions of HB-LEDs, and their form-factor flexibility, opens the door to making aesthetic improvements for lighting in automotive, aeronautical, commercial, and home environments. This follow-on shipment for the 901ACS production tool shows our customer's high degree of satisfaction with the workhorse Tegal 900 Series production etchers. These tools offer the lowest cost of ownership for many etch applications in the highly cost sensitive area of IC production for consumer electronics."

The Tegal 901ACS is the latest in a series of diode plasma etch systems produced by Tegal, the industry pioneer in commercial single-wafer plasma etching. Over 1,500 systems in the 900 Series have been shipped to date, providing reliable and cost-effective support for a wide range of plasma etch processes. The Tegal 900ACS Series is optimized for pad, zero layer, non-selective nitride, backside, and planarization etching, as well as for oxide, nitride, poly, and compound materials applications for HB-LED, MEMS, and Optoelectronic device fabrication. The 900ACS Series platform incorporates a production-proven transport system that can accommodate 75 mm to 200 mm round, square or rectangular substrates.

Also of note, the Advanced Control System (ACS) upgrade is available exclusively from Tegal as a field or factory retrofit for the existing installed base of 900 and 980 series systems. The ACS features a fully integrated graphical user interface, parametric data logging, full factory automation support, and throughput enhancements for the wafer-handling system. For information on the 900 series ACS upgrade package, please contact your local Tegal representative or email .

Safe Harbor Statement

Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.


About Tegal Corporation
Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor, optoelectronic, MEMS, and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegalís system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.

For more information, please click here

Tegal Corporation
Murali Narasimhan, 707-763-5600
Vice President Ė Marketing
The Blue Shirt Group
Rakesh Mehta, 415-217-7722
Chris Danne, 415-217-7722

Copyright © Business Wire 2007

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