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Home > News > Closed-Loop XYZ-Piezo-Scanner Provides 25 Picometers Resolution from PI

March 23rd, 2007

Closed-Loop XYZ-Piezo-Scanner Provides 25 Picometers Resolution from PI

Abstract:
Features & Advantages:

* High-Speed XYZ Scanner for AFM / SPM & Manipulation Tool for Nanotechnology
* Custom, High-Stiffness Shear Piezo Drives Provide up to 10 kHz Resonant Frequency for Faster Response and Higher Scanning Performance
* Ultra-Low-Noise Controller: 25 Picometers (0.025 nm) Resolution
* Capacitive Feedback for Exceptional Precision and Linearity
* Parallel Metrology for Better Multi-Axis Accuracy
* Small & Rugged Design with Titanium Case
* Vacuum Compatible

Source:
optics.org

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