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Home > Press > BOC Edwards Donates Dense Fluid Processor to MassNanoTech Institute

Gift of semiconductor wafer chamber and associated pumps to help further the research facility's mission to move nanotechnology from laboratory to manufacturing.

BOC Edwards Donates Dense Fluid Processor to MassNanoTech Institute

Boston, MA | Posted on February 13th, 2007

BOC Edwards, a leading supplier of vacuum, abatement, chemical management equipment and services to the world's semiconductor OEMs and fabs, announced today that it has donated one DFP 200 Dense Fluid Processor High-precision Advanced Wafer Chamber System and associated pumps, valves and other components to the MassNanoTech Institute. The University of Massachusetts Amherst's campus-wide initiative for nanoscale science and engineering.

The donation will be used by the MassNanoTech Institute in support of its educational and research programs under the auspices of the Center for Hierarchical Manufacturing. "BOC Edwards is interested in supporting the local community and universities whenever possible," said Phil Blakey, US semiconductor president, BOC Edwards. "This donation is meant to assist in furthering education and technological innovation."

"We are pleased to accept this generous donation from BOC Edwards," said James Watkins, director, MassNanoTech Institute. "One of the goals of the MassNanoTech Institute is to fabricate new nanoscale devices and collaborate with industry in the development of prototypes and new technology. This equipment will assist in our R&D programs that are focused on moving nanotechnology from the laboratory to manufacturing."


About BOC Edwards
BOC Edwards is a leading supplier to the world's most advanced industries including semiconductor, compound semiconductor, chemical, pharmaceutical, metallurgy, scientific instrumentation and research & development.

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