Home > Press > Hybrid Nanoprecision Linear Stage Provides 100 mm Travel, 4 nm Resolution
New hybrid system overcomes the limitations of conventional precision positioning systems by combining the well-known piezo-flexure-drive advantages of unlimited resolution & rapid response with the long travel ranges and high holding forces of a servo-motor / ballscrew arrangement.
Hybrid Nanoprecision Linear Stage Provides 100 mm Travel, 4 nm Resolution
Auburn, MA | Posted on February 9th, 2007
PI (Physik Instrumente) L.P., a leading manufacturer of nanopositioning and precision motion-control equipment for nanotechnology, photonics, semiconductor and life science applications, offers the M-511.HD hybrid nanopositioning translation stage. The new hybrid system overcomes the limitations of conventional precision positioning systems by combing the well-known piezo-flexure-drive advantages of unlimited resolution & rapid response with the long travel ranges and high holding forces of a servo-motor / ballscrew arrangement.
Nano-Metrology, Surface Inspection, Microscopy, Laser Technology, Interferometry
Features & Advantages
- Combines Advantages of Piezo-Flexure Drives & DC-Servo / Ballscrew Drives
- Long Travel Ranges to 100 mm
- 4 Nanometer Linear Encoder Resolution
- Reliable Execution of Nanometer Level Increments
- Millisecond Settling Time to Nanometer Accuracy
- Active Compensation of Stick/Slip During Startup and Settling
- Active Backlash Compensation
- Excellent Velocity Control
- 100 kg Load Capacity
- High Holding Forces with Minimum Power Consumption
Hybrid Controller Technology is Key to Success
The highly specialized C-702 Hybrid Nanopositioning Controller reads the stage position from an integrated, 4 nm resolution linear encoder and continuously actuates both the piezoelectric and servo motor drives in a way to provide the best possible overall performance. Due to its high stiffness and instantaneous, sub-millisecond response, the integrated piezo flexure drive provides active stick/slip compensation during startup and settling. It also improves velocity control and is the key to achieving consistent and repeatable nanometer level positioning increments.
Never Miss a Count: Novel High-Bandwidth Encoder Interface
The C-702 Hybrid controller is equipped with a novel, high-speed encoder interface and can handle encoder count rates of 100 million pulses per second, without missing a single count. Thanks to its real-time operating system, the intricacies of the hybrid drive are completely transparent to the user. Interface to the host computer is via TCP/IP or RS-232; this interface makes it possible to operate and monitor the system over any TCP/IP-compatible network (intranet/internet).
About Physik Instrumente
PI, a global, ISO 9001 certified market leader in the field of nanopositioning technology, has been developing and manufacturing standard, custom and OEM products with piezo and motor drives for 35+ years. PI is present worldwide with eight subsidiaries and total staff of 400+.
For more information, please click here
Phone: 508 832 3456
Fax: 508 832 0506
Copyright © Physik Instrumente
If you have a comment, please Contact
Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.
Iranian Scientists Separate Zinc Ion at Low Concentrations September 20th, 2014
Arrowhead to Present at BioCentury's NewsMakers in the Biotech Industry Conference September 19th, 2014
SouthWest NanoTechnologies (SWeNT) Receives NIST Small Business Innovation Research (SBIR) Phase 1 Award to Produce Greater than 99% Semiconducting Single-Wall Carbon Nanotubes September 19th, 2014
Toward optical chips: A promising light source for optoelectronic chips can be tuned to different frequencies September 19th, 2014
IEEE International Electron Devices Meeting To Celebrate 60th Anniversary as The Leading Technical Conference for Advanced Semiconductor Devices September 18th, 2014
FEI Opens New Technology Center in Czech Republic: FEI expands its presence in Brno with the opening of a new, larger facility September 18th, 2014
New NPZ100-403 Piezo Stage from nPoint Inc. September 17th, 2014
Researchers Create World’s Largest DNA Origami September 11th, 2014