Home > Press > Hybrid Nanoprecision Linear Stage Provides 100 mm Travel, 4 nm Resolution
New hybrid system overcomes the limitations of conventional precision positioning systems by combining the well-known piezo-flexure-drive advantages of unlimited resolution & rapid response with the long travel ranges and high holding forces of a servo-motor / ballscrew arrangement.
Hybrid Nanoprecision Linear Stage Provides 100 mm Travel, 4 nm Resolution
Auburn, MA | Posted on February 9th, 2007
PI (Physik Instrumente) L.P., a leading manufacturer of nanopositioning and precision motion-control equipment for nanotechnology, photonics, semiconductor and life science applications, offers the M-511.HD hybrid nanopositioning translation stage. The new hybrid system overcomes the limitations of conventional precision positioning systems by combing the well-known piezo-flexure-drive advantages of unlimited resolution & rapid response with the long travel ranges and high holding forces of a servo-motor / ballscrew arrangement.
Nano-Metrology, Surface Inspection, Microscopy, Laser Technology, Interferometry
Features & Advantages
- Combines Advantages of Piezo-Flexure Drives & DC-Servo / Ballscrew Drives
- Long Travel Ranges to 100 mm
- 4 Nanometer Linear Encoder Resolution
- Reliable Execution of Nanometer Level Increments
- Millisecond Settling Time to Nanometer Accuracy
- Active Compensation of Stick/Slip During Startup and Settling
- Active Backlash Compensation
- Excellent Velocity Control
- 100 kg Load Capacity
- High Holding Forces with Minimum Power Consumption
Hybrid Controller Technology is Key to Success
The highly specialized C-702 Hybrid Nanopositioning Controller reads the stage position from an integrated, 4 nm resolution linear encoder and continuously actuates both the piezoelectric and servo motor drives in a way to provide the best possible overall performance. Due to its high stiffness and instantaneous, sub-millisecond response, the integrated piezo flexure drive provides active stick/slip compensation during startup and settling. It also improves velocity control and is the key to achieving consistent and repeatable nanometer level positioning increments.
Never Miss a Count: Novel High-Bandwidth Encoder Interface
The C-702 Hybrid controller is equipped with a novel, high-speed encoder interface and can handle encoder count rates of 100 million pulses per second, without missing a single count. Thanks to its real-time operating system, the intricacies of the hybrid drive are completely transparent to the user. Interface to the host computer is via TCP/IP or RS-232; this interface makes it possible to operate and monitor the system over any TCP/IP-compatible network (intranet/internet).
About Physik Instrumente
PI, a global, ISO 9001 certified market leader in the field of nanopositioning technology, has been developing and manufacturing standard, custom and OEM products with piezo and motor drives for 35+ years. PI is present worldwide with eight subsidiaries and total staff of 400+.
For more information, please click here
Phone: 508 832 3456
Fax: 508 832 0506
Copyright © Physik Instrumente
If you have a comment, please Contact
Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.
NanoTechnology for Defense (NT4D) October 22nd, 2014
Mechanism behind nature's sparkles revealed October 22nd, 2014
TARA Biosystems and Harris & Harris Group Form Company to Improve Safety and Efficacy of New Therapies October 22nd, 2014
Researchers patent a nanofluid that improves heat conductivity October 22nd, 2014
Special UO microscope captures defects in nanotubes: University of Oregon chemists provide a detailed view of traps that disrupt energy flow, possibly pointing toward improved charge-carrying devices October 21st, 2014
Super stable garnet ceramics may be ideal for high-energy lithium batteries October 21st, 2014
Detecting Cancer Earlier is Goal of Rutgers-Developed Medical Imaging Technology: Rare earth nanocrystals and infrared light can reveal small cancerous tumors and cardiovascular lesions October 21st, 2014
New Grand ARM Transmission Electron Microscope Offers Highest Commercially-Available Atomic Resolution of 63 Picometers October 17th, 2014