Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Canon Marketing Japan acquires exclusive sales right of Obducat’s Nano Imprint Lithography Equipment

Abstract:
Canon Marketing Japan (President : Haruo Murase) is pleased to announce that it has signed an exclusive distribution agreement with Obducat (CEO : Patrik Lundstrom). The agreement gives CMJ the exclusive rights to sell Obducat's Nano Imprint Lithography equipment in Japan. Canon Marketing Japan will start marketing the equipment from March 1st, 2007 and enter into the new marketplace of nanoimprint equipment.

Canon Marketing Japan acquires exclusive sales right of Obducat’s Nano Imprint Lithography Equipment

Sweden and Japan | Posted on February 9th, 2007

NIL equipments, by pressing stampers to resist coated on substrates, enable transferring small feature pattern to optical components etc in the nanometer range and realize cost efficient pattern replication compared to existing photolithography equipments.

Nowadays, in line with the miniaturization and multifunctional capability of optical components such as polarizing elements, microlens arrays and LEDs or the density growth in storage devices such as magnetic or optical disks, needs for creating fine patterns to all kinds of substrates is growing. CMJ, having been marketing various equipments, including semiconductor-manufacturing equipments, LCD panel manufacturing equipments and measurement equipments, to the leading-edge industry, will further expand its business in the Industrial area with the new release of the nanoimprint equipment.

Obducat' NIL equipment, utilizes Obducat's proprietary "SoftPressTM " technology, which enables air pressure to be evenly distributed, ensuring a uniform and thin pattern over substrates. In addition, Obducat's "STUTM (Simultaneous Thermal and UVTM)" technology enables simultaneously combined UV and thermal NIL, allowing precise imprint to substrates. The patented "IPS (Intermediate Polymer Stamp)" imprint process enables contamination control and increases the stamp lifetime through a two-step
process where the contact between the master stamp and the hard substrate is avoided.

Instead a process with a soft intermediate stamp is used to transfer the pattern from the master to the substrate.
[key benefit]
● Soft Press TM technology : Full area uniform imprint
● STUTM (Simultaneous Thermal and UVTM) technology : Precise pattern transfer
● IPSTM (Intermediate Polymer StampTM) technology : Yield improvement

1. Soft Press Technology™ Full area uniform imprint Realizes uniform imprint by pressing stampers against substrates with air pressure. The use of Soft Press™ ensures parallelism between stamp and substrate, resulting in a thin and uniform residual layer at better than +/- 10 nm and is independent of substrate size shape and waviness.

2. STU™ - Simultaneous Thermal and UV™ Precise pattern transfer Obducat's proprietary STU™ technology enables simultaneously combined UV and thermal NIL, allowing imprint to UV-curable thermoplastic pre-polymers at a constant temperature. The method has been developed in order to overcome problems generating from the difference in thermal expansions between stamps and substrates. The method allows the use of spin-coated UV-curable polymers with a homogeneous thickness distribution on wafer scale, crucial for CD control and enabling pattern transfer to an
underlying substrate.

3. IPS™ - Intermediate Polymer Stamp™ Yield improvement This IPSTM technology was developed to solve the several concerns pointed out in the method which stampers directly touch substrates. The IPSTM technology enables contamination control, increases the stamp lifetime and avoids breakage, through a twostep process where the contact between the master stamp and the hard substrate is avoided. Instead a process with a soft intermediate stamp is used to transfer the pattern from the master to the substrate.

4. Auto transfer capabilities of substrate and stamper
Imprint under clean environment
Respective pod stages for both substrates and stamps enable to correspond to mini environment method. By using the private robot for auto transfer, risk of breakage during transportation and the contamination risk are alleviated. By equipping ULPA filter within the system, the transportation area of the substrates and stampers can be maintained at a class 10 level clean environment. Controlling contamination with the IPS™ technology and the pod function ensures improving yield.

####

About Obducat
Obducat is the world-leading supplier of lithography solutions for manufacturing and replication of advanced micro- and nano- scale structures.

Obducat develops and sells lithography solutions for production and replication of advanced micro- and nanostructures for industrial mass production and for research and development. Sales include equipment, stampers, process optimization, and licenses. Obducat also offers Scanning electron microscopes for metrology purposes.

For more information, please click here

Contacts:
Obducat AB
P.O. Box 580
201 25 Malmö
SWEDEN
Geijersgatan 2A, 216 18 Malmö
Phone: +46 40 362100
Fax: +46 40 362160
E-mail:

Copyright © Obducat AB

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Announcements

Candy cane supercapacitor could enable fast charging of mobile phones August 17th, 2017

Freeze-dried foam soaks up carbon dioxide: Rice University scientists lead effort to make novel 3-D material August 16th, 2017

Gold shines through properties of nano biosensors: Researchers discover that fluorescence in ligand-protected gold nanoclusters is an intrinsic property of the gold particles themselves August 16th, 2017

Two Scientists Receive Grants to Develop New Materials: Chad Mirkin and Monica Olvera de la Cruz recognized by Sherman Fairchild Foundation August 16th, 2017

Tools

Scientists from the University of Manchester and Diamond Light Source work with Deben to develop and test a new compression stage to study irradiated graphite at elevated temperatures August 15th, 2017

FRITSCH • Milling and Sizing! Innovations at POWTECH 2017 - Hall 2 • Stand 227 August 9th, 2017

Industry’s First Dedicated Cryo-DualBeam System Automates Preparation of Frozen, Biological Samples: New Thermo Scientific Aquilos FIB/SEM protects sample integrity and enhances productivity for cryo-electron tomography workflow August 8th, 2017

Thermo Fisher Scientific Advances Cryo-EM Leadership to Drive Structural Biology Discoveries: New Thermo Scientific Krios G3i raises bar for performance, automation and time-to-results Breakthrough Thermo Scientific Glacios provides a cryo-EM entry path for a broader range of res August 8th, 2017

Alliances/Trade associations/Partnerships/Distributorships

Oxford Instruments Plasma Technology announces a new partner in Korea August 15th, 2017

Moving at the Speed of Light: University of Arizona selected for high-impact, industrial demonstration of new integrated photonic cryogenic datalink for focal plane arrays: Program is major milestone for AIM Photonics August 10th, 2017

Technology Companies Join Forces for TEM Imaging and Analysis August 3rd, 2017

GLOBALFOUNDRIES and VeriSilicon To Enable Single-Chip Solution for Next-Gen IoT Networks: Integrated solution leverages GF’s 22FDX® technology to decrease power, area, and cost for NB-IoT and LTE-M applications July 14th, 2017

New-Contracts/Sales/Customers

Probiotics: Novel biosynthetic tool to develop metallic nanoparticles: This research article by Dr. Nida Akhtar et al has been published in Recent Patents on Drug Delivery & Formulation, Volume 11, Issue 1, 2017 July 20th, 2017

Here's a tip: Indented cement shows unique properties: Rice University models reveal nanoindentation can benefit crystals in concrete July 20th, 2017

NMRC, University of Nottingham chooses the Quorum Q150 coater for its reliable and reproducible film thickness when coating samples with iridium June 27th, 2017

Park Systems Introduces Park NX12 for Unsurpassed Affordable High Resolution NanoScale Imaging Required for Advanced Analytical Chemistry, Materials Research, and Multi-User Facility June 5th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project