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Home > News > Soft Lithography – A Low Cost, Production Method For Producing Nano Sized Features Even On Curved Surfaces

January 21st, 2007

Soft Lithography – A Low Cost, Production Method For Producing Nano Sized Features Even On Curved Surfaces

Abstract:
Soft lithography is so called because it utilises cast moulded stamps made from flexible materials.

The process begins with the creation of a master. The master is made by etching a blank - normally a silicon wafer - with a negative photoresist. This gives a raised pattern of nanometer sized features on the silicon wafer that corresponds with the required channels in the polymer stamp.

Source:
azonano.com

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