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Home > News > Tokyo Electron (TEL) Acquires Epion Corporation

January 10th, 2007

Tokyo Electron (TEL) Acquires Epion Corporation

Tokyo Electron (TEL) (TOKYO:8035), the world's second largest supplier of semiconductor production equipment (SPE), today announced the company has acquired Epion Corporation, supplier of gas cluster ion beam (GCIB) technology for diverse semiconductor applications and emerging nanotechnology markets.


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