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Home > News > New Targets May Hit Bullís-Eye for Chip Makers

December 7th, 2006

New Targets May Hit Bullís-Eye for Chip Makers

Abstract:
The bull's-eye solution to the semiconductor industry's hunt for more exact means to measure the relative positions of ever-tinier devices squeezed by the millions onto silicon chips might be new types of targets, and not expensive new equipment, according to modeling studies by the National Institute of Standards and Technology.

Source:
physorg.com

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