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December 1st, 2006

Focus on nanoscale science and technology

Abstract:
Carl Zeiss SMT and SII NanoTechnology have jointly developed the XVision 300 focused ion beam/scanning electron microscope hybrid system to provide ultrahigh resolution, 3D-surface and -subsurface process inspection, and defect analysis on 300-mm wafers at the 65/45-nm design mode and beyond.

Source:
physicstoday.org

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