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Home > Press > Scanning Stage Provides 100 nm Resolution, 240 mm/sec Speed

Abstract:
QuickScan™ series voice coil scanning stages provide up to 20 mm travel and resolution to 100 nm. They were designed for motion-control applications in bio / nanotechnology, photonics & semiconductors

Scanning Stage Provides 100 nm Resolution, 240 mm/sec Speed

Posted on November 1, 2006

Cost-Effective PCI-bus Motion Controller Card w/ On-Board Amplifiers
QuickScan™ systems are driven by a PCI-bus motion controller card with on-board linear servo amplifiers. Based on a frictionless, backlash-free, voice coil linear motor drive and a high-precision optical encoder featuring 100 nanometer resolution, the systems provide extremely smooth motion with velocities to 240 mm /s (~ 9.6 inch/s).

Higher Dynamics & Lifetime than Screw-Type Drive Mechanisms
V-106 QuickScan™stages achieve significantly higher dynamics than leadscrew-based units with scanning frequencies to 20 Hz and above for small loads. Another advantage of the frictionless voice coil drive is greater reliability and lifetime than screw-type drive mechanisms. For high-throughput positioning applications, the short settling times of 75 ms for 5 mm step are a real benefit.

Features & Advantages

  • Frictionless voice-coil linear motor drive for smooth, ripple-free motion
  • Velocity up to 240 mm/sec (9.6 inch/sec)
  • Scanning frequency several 10s of Hz
  • Direct metrology linear encoder with 100 nanometer resolution
  • Travel ranges of 20 mm and 6 mm
  • Precision cross-roller bearings for ultra-straight and smooth motion
  • Cost-effective PCI-card controller with on-board amplifiers

Applications
These closed-loop scanning & positioning stages were designed for high-dynamics precision motion control applications, like those in biotechnology; laser beam control; scanning; optics; lens finishing; and fiber optics.

More information on the V-106 is available here

####

About Physik Instrumente:
PI is the industry leader in ultra-precision motion control devices for nanoscale manufacturing, test and research applications in industries from biotechnology to semiconductors. PI has been developing and manufacturing standard & custom precision products with piezoelectric and electromagnetic drives for 35+ years. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eight subsidiaries and total staff of 400+.

For more information, please click here

Contact:
Stefan Vorndran
508 832 3456
Fax: 508 832 0506
stefanv@pi-usa.us

Copyright © Physik Instrumente

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