Home > Press > SEMATECH Collaborates with University of Queensland
SEMATECH Collaborates with University of Queensland to Help Develop High Index Immersion Photoresists
Austin, TX | May 25, 2006
SEMATECH and the University of
Queensland (Brisbane, Australia) will collaborate in a project that aims
to develop new resists for 193 nm immersion lithography, an emerging
technology for advanced semiconductor manufacturing.
Technologists from SEMATECH and the university will identify and
qualify novel, high-refractive-index polymers for 193 nm photoresists in
an effort to extend immersion lithography for multiple technology
generations. This project is a key component of a broader SEMATECH
program to extend immersion through novel high refractive index
materials in three categories: resist, immersion fluids and lens
Immersion lithography combines the familiar 193 nm light wavelength with
a refracting fluid such as water to define patterns as narrow as 45 nm
in advanced microchips. Increasing the refractive index of photoresists,
along with the immersion fluid and lens material, offers the possibility
of extending immersion lithography to patterns as narrow as 32 nm.
Also, increasing just the refractive index of photoresists offers the
possibility to improve the process latitude of patterned features on a
semiconductor wafer, thereby extending the capability of a given
A two-year grant for $510,000 Australian dollars from the
Australian Research Council (ARC) will be matched by SEMATECH with cash
and in-kind contributions, including access to advanced immersion
lithography exposure tools through SEMATECH's Immersion Technology
Center, as well as project management and logistical resources. The ARC
is a government agency that funds research that can bring economic,
social and cultural benefits to the country.
"One of our basic objectives at SEMATECH is to maximize the
world's R&D resources through leverage and creative partnerships," said
Michael R. Polcari, SEMATECH president and CEO. "This agreement with ARC
certainly exemplifies that aim, and allows us to share expertise with a
region that is seeking to become a world leader in microelectronics."
SEMATECH's role in the project was defined by Will Conley, a Freescale
assignee. "The research of high-index polymers will provide the
industry with an additional avenue for the extension of optical
lithography," Conley said. "The partnership between SEMATECH and the
University of Queensland already has yielded many interesting material
platforms, and this grant from the ARC will permit the further research
Professor Andrew Whittaker, director for the Centre for Magnetic
Resonance of the University of Queensland, said: "The support of
SEMATECH on this project enables the university to assemble a
world-class team dedicated to synthesis of novel resist polymers. From
our perspective, the agreement with the ARC and SEMATECH allows us to
contribute to an exciting technology of great international importance.
"From the point of view of the Australian economy, the funding provides
employment for talented young scientists, and provides a platform for
continued research within Australia in the field of photolithography."
The Australian grant for the project was described as one of the largest
awarded by the ARC in recent rounds of funding. "The materials to be
developed are expected to provide the basis of future generations of
microchips," according to a project summary that accompanied the grant.
"A major outcome of this project will be establishment of Australia as a
world leader in this rapidly expanding field."
SEMATECH is the world's catalyst for accelerating the commercialization of technology innovations into manufacturing solutions. By setting global direction, creating opportunities for flexible collaboration, and conducting strategic R&D, SEMATECH delivers significant leverage to our semiconductor and emerging technology partners. In short, we are accelerating the next technology revolution.
SEMATECH, the SEMATECH logo, AMRC, Advanced Materials Research Center, ATDF, the ATDF logo, Advanced Technology Development Facility, ISMI and
International SEMATECH Manufacturing Initiative are servicemarks of SEMATECH, Inc.
For more information, please visit www.sematech.org
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