Nanotechnology Now

Our NanoNews Digest Sponsors


Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > SEMATECH Collaborates with University of Queensland

SEMATECH Collaborates with University of Queensland to Help Develop High Index Immersion Photoresists

Sematech

Austin, TX | May 25, 2006

SEMATECH and the University of Queensland (Brisbane, Australia) will collaborate in a project that aims to develop new resists for 193 nm immersion lithography, an emerging technology for advanced semiconductor manufacturing.

Technologists from SEMATECH and the university will identify and qualify novel, high-refractive-index polymers for 193 nm photoresists in an effort to extend immersion lithography for multiple technology generations. This project is a key component of a broader SEMATECH program to extend immersion through novel high refractive index materials in three categories: resist, immersion fluids and lens materials.

Immersion lithography combines the familiar 193 nm light wavelength with a refracting fluid such as water to define patterns as narrow as 45 nm in advanced microchips. Increasing the refractive index of photoresists, along with the immersion fluid and lens material, offers the possibility of extending immersion lithography to patterns as narrow as 32 nm.

Also, increasing just the refractive index of photoresists offers the possibility to improve the process latitude of patterned features on a semiconductor wafer, thereby extending the capability of a given lithography toolset.

A two-year grant for $510,000 Australian dollars from the Australian Research Council (ARC) will be matched by SEMATECH with cash and in-kind contributions, including access to advanced immersion lithography exposure tools through SEMATECH's Immersion Technology Center, as well as project management and logistical resources. The ARC is a government agency that funds research that can bring economic, social and cultural benefits to the country.

"One of our basic objectives at SEMATECH is to maximize the world's R&D resources through leverage and creative partnerships," said Michael R. Polcari, SEMATECH president and CEO. "This agreement with ARC certainly exemplifies that aim, and allows us to share expertise with a region that is seeking to become a world leader in microelectronics."

SEMATECH's role in the project was defined by Will Conley, a Freescale assignee. "The research of high-index polymers will provide the industry with an additional avenue for the extension of optical lithography," Conley said. "The partnership between SEMATECH and the University of Queensland already has yielded many interesting material platforms, and this grant from the ARC will permit the further research needed."

Professor Andrew Whittaker, director for the Centre for Magnetic Resonance of the University of Queensland, said: "The support of SEMATECH on this project enables the university to assemble a world-class team dedicated to synthesis of novel resist polymers. From our perspective, the agreement with the ARC and SEMATECH allows us to contribute to an exciting technology of great international importance.

"From the point of view of the Australian economy, the funding provides employment for talented young scientists, and provides a platform for continued research within Australia in the field of photolithography."

The Australian grant for the project was described as one of the largest awarded by the ARC in recent rounds of funding. "The materials to be developed are expected to provide the basis of future generations of microchips," according to a project summary that accompanied the grant. "A major outcome of this project will be establishment of Australia as a world leader in this rapidly expanding field."

####

About SEMATECH:
SEMATECH is the world's catalyst for accelerating the commercialization of technology innovations into manufacturing solutions. By setting global direction, creating opportunities for flexible collaboration, and conducting strategic R&D, SEMATECH delivers significant leverage to our semiconductor and emerging technology partners. In short, we are accelerating the next technology revolution.

SEMATECH, the SEMATECH logo, AMRC, Advanced Materials Research Center, ATDF, the ATDF logo, Advanced Technology Development Facility, ISMI and International SEMATECH Manufacturing Initiative are servicemarks of SEMATECH, Inc.

For more information, please visit www.sematech.org

Media Contact:
Dan McGowan
512-356-3440
dan.mcgowan@sematech.org

Copyright SEMATECH

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Chip Technology

Attosecond physics: A switch for light-wave electronics May 24th, 2016

Physicists create first metamaterial with rewritable magnetic ordering May 23rd, 2016

Graphene: Progress, not quantum leaps May 23rd, 2016

Researchers demonstrate size quantization of Dirac fermions in graphene: Characterization of high-quality material reveals important details relevant to next generation nanoelectronic devices May 20th, 2016

Nanoelectronics

Researchers demonstrate size quantization of Dirac fermions in graphene: Characterization of high-quality material reveals important details relevant to next generation nanoelectronic devices May 20th, 2016

Graphene: A quantum of current - When current comes in discrete packages: Viennese scientists unravel the quantum properties of the carbon material graphene May 20th, 2016

New type of graphene-based transistor will increase the clock speed of processors: Scientists have developed a new type of graphene-based transistor and using modeling they have demonstrated that it has ultralow power consumption compared with other similar transistor devices May 19th, 2016

Self-healing, flexible electronic material restores functions after many breaks May 17th, 2016

Announcements

Light can 'heal' defects in new solar cell materials: Defects in some new electronic materials can be removed by making ions move under illumination May 24th, 2016

Attosecond physics: A switch for light-wave electronics May 24th, 2016

Supercrystals with new architecture can enhance drug synthesis May 24th, 2016

Nanoscale Trojan horses treat inflammation May 24th, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic