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Home > News > Deep-sub-wavelength Lithography

February 16th, 2006

Deep-sub-wavelength Lithography

Abstract:
Chris Phoenix: A bit over a year ago, we posted about deep-sub-wavelength imaging. Now, an article in CCNews describes deep-sub-wavelength lithography. Features as small as 26 nanometers have been generated.

Source:
Responsible Nanotechnology

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