Nanotechnology Now - News Story: "Versatile atomic level weight metrology tool from Metryx"

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January 10th, 2006

Versatile atomic level weight metrology tool from Metryx

Abstract:
A new, non-destructive, nanotechnology weight metrology tool has been introduced by Metryx to handle high volume production of 300mm semiconductor wafers.

Source:
fabtech.org

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