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Home > News > Weight metrology tool keeps wafers honest

December 15th, 2005

Weight metrology tool keeps wafers honest

Abstract:
Metrology specialist, Metryx, has unveiled an innovative nanotechnology weight metrology tool that offers atomic layer measurement accuracy and is designed to handle the demands of volume production environments where only a single 300mm wafer cassette is required.

Source:
electronicstalk.com

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