Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > SEMATECH Receives Key Litho Tool

SEMATECH Receives Key Litho Tool in Texas to Develop Advanced ICs

Austin, TX | September 01, 2005

SEMATECH has received a key tool for exploring the extension of immersion lithography to produce advanced semiconductors at the 45 nm half-pitch lithography generation and beyond.

The tool, an interference immersion exposure system from Amphibian Systems, will be placed in the Immersion Technology Center (iTC), which focuses on extending immersion lithography beyond pure water-based approaches. The Amphibian equipment arrived in August and will be available this month for use by SEMATECH and researchers from its member companies and suppliers. The iTC forms part of the Advanced Materials Research Center (AMRC), a joint effort between SEMATECH and Texas universities, and will also be available for use by academic researchers from around the state.

"The Amphibian is the latest in a series of highly engineered tools that will help to explore the ultimate limits of optical lithography," said Kevin Kemp, SEMATECH's lithography director. "It also puts Texas in the forefront of one of our industry's most promising R&D initiatives."

In immersion lithography, a transparent liquid is placed between an exposure tool's projection lens and a wafer, allowing higher resolution to be achieved. Previous work at SEMATECH has been focused on bringing immersion lithography to the point of manufacturability using pure water as the immersion fluid. Now, the focus is shifting toward extending the technology even further using fluids with higher refractive indices than water, larger numerical apertures (NAs), special photoresists, and polarization-adjustment strategies.

The Amphibian system is designed to study immersion lithography with novel fluids and resists at up to 1.5 NA. The tool consists of a 2 mm exposure field size, a full range of polarization controls, and the ability to image both line patterns and contact features. A fluid delivery system allows for the use of water or alternative fluids, with the ability to change fluids rapidly between wafers. The system is fully enclosed in an ultra-clean environment.

The AMRC focuses on leading-edge materials and capabilities for next-generation semiconductors, as well as cutting-edge research in nanotechnology, biotechnology, and other related advanced high-tech areas. The aim of the five-year AMRC effort is to accelerate the commercialization of critical technology research that economists believe will generate the industries, careers, and tax revenue of the future.

####

About SEMATECH:
SEMATECH is the world's catalyst for accelerating the commercialization of technology innovations into manufacturing solutions. By setting global direction, creating opportunities for flexible collaboration, and conducting strategic R&D, SEMATECH delivers significant leverage to our semiconductor and emerging technology partners. In short, we are accelerating the next technology revolution.

SEMATECH, the SEMATECH logo, AMRC, Advanced Materials Research Center, ATDF, the ATDF logo, Advanced Technology Development Facility, ISMI and International SEMATECH Manufacturing Initiative are servicemarks of SEMATECH, Inc.

For more information, please visit www.sematech.org

Media Contact:
Dan McGowan
512-356-3440
dan.mcgowan@sematech.org

Copyright © SEMATECH

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Chip Technology

A*STAR and industry form S$200M semiconductor R&D July 25th, 2014

A Crystal Wedding in the Nanocosmos July 23rd, 2014

Nanometrics Announces Upcoming Investor Events July 22nd, 2014

Penn Study: Understanding Graphene’s Electrical Properties on an Atomic Level July 22nd, 2014

Nanoelectronics

A*STAR and industry form S$200M semiconductor R&D July 25th, 2014

A Crystal Wedding in the Nanocosmos July 23rd, 2014

3-D nanostructure could benefit nanoelectronics, gas storage: Rice U. researchers predict functional advantages of 3-D boron nitride July 15th, 2014

IBM Announces $3 Billion Research Initiative to Tackle Chip Grand Challenges for Cloud and Big Data Systems: Scientists and engineers to push limits of silicon technology to 7 nanometers and below and create post-silicon future July 10th, 2014

Announcements

Measuring the Smallest Magnets July 28th, 2014

WITec to host the 11th Confocal Raman Imaging Symposium from September 29th - October 1st in Ulm, Germany July 28th, 2014

FEI adds Phase Plate Technology and Titan Halo TEM to its Structural Biology Product Portfolio: New solutions provide the high-quality imaging and contrast necessary to analyze the 3D structure of molecules and molecular complexes July 28th, 2014

Production of Toxic Gas Sensor Based on Nanorods July 28th, 2014

Tools

WITec to host the 11th Confocal Raman Imaging Symposium from September 29th - October 1st in Ulm, Germany July 28th, 2014

FEI adds Phase Plate Technology and Titan Halo TEM to its Structural Biology Product Portfolio: New solutions provide the high-quality imaging and contrast necessary to analyze the 3D structure of molecules and molecular complexes July 28th, 2014

Bruker Announces Acquisition of High-Speed, 3D Super-Resolution Fluorescence Microscopy Company Vutara July 28th, 2014

Malvern Instruments completes acquisition of MicroCal and announces purchase of Archimedes product from Affinity Biosensors July 25th, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE