Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > SEMATECH Receives Key Litho Tool

SEMATECH Receives Key Litho Tool in Texas to Develop Advanced ICs

Austin, TX | September 01, 2005

SEMATECH has received a key tool for exploring the extension of immersion lithography to produce advanced semiconductors at the 45 nm half-pitch lithography generation and beyond.

The tool, an interference immersion exposure system from Amphibian Systems, will be placed in the Immersion Technology Center (iTC), which focuses on extending immersion lithography beyond pure water-based approaches. The Amphibian equipment arrived in August and will be available this month for use by SEMATECH and researchers from its member companies and suppliers. The iTC forms part of the Advanced Materials Research Center (AMRC), a joint effort between SEMATECH and Texas universities, and will also be available for use by academic researchers from around the state.

"The Amphibian is the latest in a series of highly engineered tools that will help to explore the ultimate limits of optical lithography," said Kevin Kemp, SEMATECH's lithography director. "It also puts Texas in the forefront of one of our industry's most promising R&D initiatives."

In immersion lithography, a transparent liquid is placed between an exposure tool's projection lens and a wafer, allowing higher resolution to be achieved. Previous work at SEMATECH has been focused on bringing immersion lithography to the point of manufacturability using pure water as the immersion fluid. Now, the focus is shifting toward extending the technology even further using fluids with higher refractive indices than water, larger numerical apertures (NAs), special photoresists, and polarization-adjustment strategies.

The Amphibian system is designed to study immersion lithography with novel fluids and resists at up to 1.5 NA. The tool consists of a 2 mm exposure field size, a full range of polarization controls, and the ability to image both line patterns and contact features. A fluid delivery system allows for the use of water or alternative fluids, with the ability to change fluids rapidly between wafers. The system is fully enclosed in an ultra-clean environment.

The AMRC focuses on leading-edge materials and capabilities for next-generation semiconductors, as well as cutting-edge research in nanotechnology, biotechnology, and other related advanced high-tech areas. The aim of the five-year AMRC effort is to accelerate the commercialization of critical technology research that economists believe will generate the industries, careers, and tax revenue of the future.

####

About SEMATECH:
SEMATECH is the world's catalyst for accelerating the commercialization of technology innovations into manufacturing solutions. By setting global direction, creating opportunities for flexible collaboration, and conducting strategic R&D, SEMATECH delivers significant leverage to our semiconductor and emerging technology partners. In short, we are accelerating the next technology revolution.

SEMATECH, the SEMATECH logo, AMRC, Advanced Materials Research Center, ATDF, the ATDF logo, Advanced Technology Development Facility, ISMI and International SEMATECH Manufacturing Initiative are servicemarks of SEMATECH, Inc.

For more information, please visit www.sematech.org

Media Contact:
Dan McGowan
512-356-3440
dan.mcgowan@sematech.org

Copyright SEMATECH

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Chip Technology

Electronic circuits with reconfigurable pathways closer to reality January 26th, 2015

The latest fashion: Graphene edges can be tailor-made: Rice University theory shows it should be possible to tune material's properties January 24th, 2015

New method to generate arbitrary optical pulses January 21st, 2015

New signal amplification process set to transform communications, imaging, computing: UC San Diego researchers discover a mechanism to amplify signals in optoelectronic systems that is far more efficient than standard processes January 21st, 2015

Nanoelectronics

Electronic circuits with reconfigurable pathways closer to reality January 26th, 2015

Rice-sized laser, powered one electron at a time, bodes well for quantum computing January 15th, 2015

Rapid journey through a crystal lattice: Researchers measure how fast electrons move through single atomic layers January 14th, 2015

A new step towards using graphene in electronic applications January 14th, 2015

Announcements

Nanoparticles Increase Durability of Concrete Decorations in Cold Areas January 26th, 2015

Iranian Researchers Boost Solar Cells Efficiency Using Anti-Aggregates January 26th, 2015

Detection of Heavy Metals in Samples with Naked Eye January 26th, 2015

Engineering self-assembling amyloid fibers January 26th, 2015

Tools

Visualizing interacting electrons in a molecule: Scientists at Aalto University and the University of Zurich have succeeded in directly imaging how electrons interact within a single molecule January 26th, 2015

Graphene brings quantum effects to electronic circuits January 22nd, 2015

EnvisioNano: An image contest hosted by the National Nanotechnology Initiative (NNI) January 22nd, 2015

New Molecular Beam Epitaxy deposition equipment at the ICN2 January 22nd, 2015

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2015 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE