Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > SEMATECH Receives Key Litho Tool

SEMATECH Receives Key Litho Tool in Texas to Develop Advanced ICs

Austin, TX | September 01, 2005

SEMATECH has received a key tool for exploring the extension of immersion lithography to produce advanced semiconductors at the 45 nm half-pitch lithography generation and beyond.

The tool, an interference immersion exposure system from Amphibian Systems, will be placed in the Immersion Technology Center (iTC), which focuses on extending immersion lithography beyond pure water-based approaches. The Amphibian equipment arrived in August and will be available this month for use by SEMATECH and researchers from its member companies and suppliers. The iTC forms part of the Advanced Materials Research Center (AMRC), a joint effort between SEMATECH and Texas universities, and will also be available for use by academic researchers from around the state.

"The Amphibian is the latest in a series of highly engineered tools that will help to explore the ultimate limits of optical lithography," said Kevin Kemp, SEMATECH's lithography director. "It also puts Texas in the forefront of one of our industry's most promising R&D initiatives."

In immersion lithography, a transparent liquid is placed between an exposure tool's projection lens and a wafer, allowing higher resolution to be achieved. Previous work at SEMATECH has been focused on bringing immersion lithography to the point of manufacturability using pure water as the immersion fluid. Now, the focus is shifting toward extending the technology even further using fluids with higher refractive indices than water, larger numerical apertures (NAs), special photoresists, and polarization-adjustment strategies.

The Amphibian system is designed to study immersion lithography with novel fluids and resists at up to 1.5 NA. The tool consists of a 2 mm exposure field size, a full range of polarization controls, and the ability to image both line patterns and contact features. A fluid delivery system allows for the use of water or alternative fluids, with the ability to change fluids rapidly between wafers. The system is fully enclosed in an ultra-clean environment.

The AMRC focuses on leading-edge materials and capabilities for next-generation semiconductors, as well as cutting-edge research in nanotechnology, biotechnology, and other related advanced high-tech areas. The aim of the five-year AMRC effort is to accelerate the commercialization of critical technology research that economists believe will generate the industries, careers, and tax revenue of the future.

####

About SEMATECH:
SEMATECH is the world's catalyst for accelerating the commercialization of technology innovations into manufacturing solutions. By setting global direction, creating opportunities for flexible collaboration, and conducting strategic R&D, SEMATECH delivers significant leverage to our semiconductor and emerging technology partners. In short, we are accelerating the next technology revolution.

SEMATECH, the SEMATECH logo, AMRC, Advanced Materials Research Center, ATDF, the ATDF logo, Advanced Technology Development Facility, ISMI and International SEMATECH Manufacturing Initiative are servicemarks of SEMATECH, Inc.

For more information, please visit www.sematech.org

Media Contact:
Dan McGowan
512-356-3440
dan.mcgowan@sematech.org

Copyright © SEMATECH

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Chip Technology

Nanometrics to Participate in the Citi 2015 Global Technology Conference August 26th, 2015

Kwansei Gakuin University in Hyogo, Japan, uses Raman microscopy to study crystallographic defects in silicon carbide wafers August 25th, 2015

A little light interaction leaves quantum physicists beaming August 25th, 2015

'Magic' sphere for information transfer: Professor at the Lomonosov Moscow State University made the «magic» sphere for information transfer August 24th, 2015

Nanoelectronics

Nanotechnology that will impact the Security & Defense sectors to be discussed at NanoSD2015 conference August 25th, 2015

'Quantum dot' technology may help light the future August 19th, 2015

Surprising discoveries about 2-D molybdenum disulfide: Berkeley Lab researchers use award-winning campanile probe on promising semiconductor August 15th, 2015

Better together: Graphene-nanotube hybrid switches August 3rd, 2015

Announcements

Iranian Scientists Use Artemisia Annua Plant to Produce Breast Cancer Drugs August 29th, 2015

Small but heading for the big time: Nanobiotix half year results for the six months ended 30 June 2015, in line with expectations: Major clinical achievements and corporate developments August 28th, 2015

A new technique to make drugs more soluble August 28th, 2015

Nanocatalysts improve processes for the petrochemical industry August 28th, 2015

Tools

Nanolab Technologies LEAPS Forward with High-Performance Analysis Services to the World: Nanolab Orders Advanced Local Electrode Atom Probe (LEAP®) Microscope from CAMECA Unit of AMETEK Materials Analysis Division August 27th, 2015

Nanometrics to Participate in the Citi 2015 Global Technology Conference August 26th, 2015

50 Years of Scanning Electron Microscopy from ZEISS: ZEISS celebrates the birth of the first commercial scanning electron microscope in 1965 August 26th, 2015

Announcing Oxford Instruments and School of Physics signing a Memorandum of Understanding August 26th, 2015

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic