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Home > News > Nanofabrication: next generation chip manufacture?

August 29th, 2005

Nanofabrication: next generation chip manufacture?

Abstract:
A new nanotechnology tool that will dramatically cut the cost of leading-edge nano research at the sub-50nm scale has been developed by EU researchers. It could lead to Next Generation Lithography (NGL) technology.

Source:
CORDIS

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