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Home > News > AMRC Developing Nano-Metrology to Probe Chip Structures at Atomic Level

August 16th, 2005

AMRC Developing Nano-Metrology to Probe Chip Structures at Atomic Level

Abstract:
Engineers at the Advanced Materials Research Center (AMRC) here are investigating a nanoscale approach to metrology that will allow them to examine new semiconductor structures at the atomic level, and so prepare the way for next-generation electronics.

Source:
marketwire.com

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