Nanotechnology Now

Our NanoNews Digest Sponsors
Heifer International

Wikipedia Affiliate Button

Home > News > Predicting the Lifetime of Extreme UV Optics

July 14th, 2005

Predicting the Lifetime of Extreme UV Optics

Abstract:
Extreme ultraviolet lithography (EUVL) may be the next-generation patterning technique used to produce smaller and faster microchips with feature sizes of 32 nanometers and below. However, durable projection optics must be developed before this laboratory technique can become commercially viable. As part of its long-standing effort to develop EUVL metrology and calibration services, the National Institute of Standards and Technology (NIST) is creating a measurement system for accelerated lifetime testing of the mirrors used in EUVL.

Source:
NIST

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Chip Technology

Nanometrics to Announce Fourth Quarter and Full Year Financial Results on February 5, 2019 January 18th, 2019

Kiel physicists discover new effect in the interaction of plasmas with solids January 18th, 2019

Brilliant glow of paint-on semiconductors comes from ornate quantum physics January 18th, 2019

January 18th, 2019

Nanoelectronics

Kiel physicists discover new effect in the interaction of plasmas with solids January 18th, 2019

Study on low noise, high-performance transistors may bring innovations in electronics December 28th, 2018

The feature size and functional range of molecular electronic devices: Monitoring the transition from tunneling leakage current to molecular tunneling December 16th, 2018

2-D magnetism: Atom-thick platforms for energy, information and computing research: Scientists say the tiny 'spins' of electrons show potential to one day support next-generation innovations in many fields October 31st, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project