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Home > News > Tegal Installs and Upgrades Advanced Etch System

July 12th, 2005

Tegal Installs and Upgrades Advanced Etch System

Abstract:
Tegal Corporation, a leading designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits and nanotechnology devices, today announced that a major European integrated device manufacturer that had previously placed a multiple system order with Tegal has increased the order to include additional 6540 advanced etch systems.

Source:
businesswire

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