Home > Press > Micronova selects Beneq as ALD technology partner
Beneq and the Microelectronics Centre at Micronova announce that they have signed an agreement where Beneq will be the ALD technology supplier to Micronova. Beneq will deliver the new generation ALD (Atomic Layer Deposition) reactor TFS-500 to Micronova by end of the year 2005.
Micronova selects Beneq as ALD technology partner
Vantaa, Finland | July 08, 2005
Beneq and the Microelectronics Centre at Micronova announce that they have signed an agreement where Beneq will be the ALD technology supplier to Micronova. Beneq will deliver the new generation ALD (Atomic Layer Deposition) reactor TFS-500 to Micronova by the end of the year 2005. Beneq's new generation TFS-500 ALD reactor is designed to be a flexible and easy to use tool for R&D and small scale production. It can handle substrates up to 300x300x300 mm which allow complex 3D pieces as well as flat and porous substrate processing. TFS-500 reactor is designed to meet industrial standards and the Beneq technology is easy to scale up.
Sampo Ahonen, Beneq's CEO: "ALD is a method for producing high quality thin films for nano structures and for functional surface modifications. The method has been known 30 years and now it has been developed to the robust level. At recent times the 'old industry' has found a wide range of new applications for ALD. By combining the production proven ALD technology to existing industrial products it is possible to reach a fast increase of the product competitiveness. We are happy to work together with the application-oriented Micronova laboratory. "
Veli-Matti Airaksinen, Microelectronics Centre’s director: "The TFS-500 ALD reactor will play a key role in ALDUS, a major nanotechnology project involving three research groups at Micronova, funded by the National Technology Agency Tekes through the FinNano programme. Beneq has developed a new innovative approach combined with proven technical solutions. Further, Beneq is a flexible and a customer-oriented company capable of meeting Micronova’s present and future needs. Beneq has a good interface to industrial challenges which will bring new opportunities for Micronova in the future."
About Beneq Oy:
Beneq Oy, Vantaa, Finland, is a manufacturer of industrial equipment for global markets. Beneq is oriented to production equipment which are designed for "chemistry at surfaces." Beneq acts as a business facilitator adding value for high-tech partner companies by converting proven innovations into industrial equipment.
For more information, please visit www.beneq.com
MICRONOVA, is the leading research centre for micro- and nanotechnology in Finland, with research groups from the Helsinki University of Technology (TKK) and Technical Research Centre of Finland (VTT). The central research focus includes micro-, nano-, and optoelectronic devices, materials, sensors, microsystems and fabrication techniques.
For more information, please visit micronova.tkk.fi
+358 40 520 1090
+358 9 7599 5310
Copyright © Beneq
If you have a comment, please Contact
Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.
Harris & Harris Group Letter to Shareholders on Website August 19th, 2014
Harris & Harris Group to Host Conference Call on Second-Quarter 2014 Financial Results on August 15, 2014 August 12th, 2014
Aspen Aerogels, Inc. to Present at Canaccord Genuity 34th Annual Growth Conference August 11th, 2014
Harris & Harris Group Reports Financial Statements as of June 30, 2014 August 10th, 2014
Rice physicist emerges as leader in quantum materials research: Nevidomskyy wins both NSF CAREER Award and Cottrell Scholar Award August 20th, 2014
Graphene may be key to leap in supercapacitor performance August 20th, 2014
Newly-Developed Nanobiosensor Quickly Diagnoses Cancer August 20th, 2014
Ultrasonic Waves Applied in Production of Graphene Nanosheets August 20th, 2014
Oxford Instruments Asylum Research Receives the 2014 Microscopy Today Innovation Award for blueDrive Photothermal Excitation August 18th, 2014
Laser makes microscopes way cooler: Cooling a nanowire probe with a laser could lead to substantial improvements in the sensitivity of atomic force probe microscopes August 15th, 2014
JPK reports on the use of AFM and advanced fluorescence microscopy at the University of Freiburg August 13th, 2014
Phasefocus reports on the use of their high-precision Lens Profiler for measuring contact lens thickness at the Brien Holden Vision Institute in Sydney, Australia August 13th, 2014