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Home > Press > Micronova selects Beneq as ALD technology partner

Beneq and the Microelectronics Centre at Micronova announce that they have signed an agreement where Beneq will be the ALD technology supplier to Micronova. Beneq will deliver the new generation ALD (Atomic Layer Deposition) reactor TFS-500 to Micronova by end of the year 2005.

Micronova selects Beneq as ALD technology partner

Vantaa, Finland | July 08, 2005

Beneq and the Microelectronics Centre at Micronova announce that they have signed an agreement where Beneq will be the ALD technology supplier to Micronova. Beneq will deliver the new generation ALD (Atomic Layer Deposition) reactor TFS-500 to Micronova by the end of the year 2005. Beneq's new generation TFS-500 ALD reactor is designed to be a flexible and easy to use tool for R&D and small scale production. It can handle substrates up to 300x300x300 mm which allow complex 3D pieces as well as flat and porous substrate processing. TFS-500 reactor is designed to meet industrial standards and the Beneq technology is easy to scale up.

Sampo Ahonen, Beneq's CEO: "ALD is a method for producing high quality thin films for nano structures and for functional surface modifications. The method has been known 30 years and now it has been developed to the robust level. At recent times the 'old industry' has found a wide range of new applications for ALD. By combining the production proven ALD technology to existing industrial products it is possible to reach a fast increase of the product competitiveness. We are happy to work together with the application-oriented Micronova laboratory. "

Veli-Matti Airaksinen, Microelectronics Centre’s director: "The TFS-500 ALD reactor will play a key role in ALDUS, a major nanotechnology project involving three research groups at Micronova, funded by the National Technology Agency Tekes through the FinNano programme. Beneq has developed a new innovative approach combined with proven technical solutions. Further, Beneq is a flexible and a customer-oriented company capable of meeting Micronova’s present and future needs. Beneq has a good interface to industrial challenges which will bring new opportunities for Micronova in the future."


About Beneq Oy:
Beneq Oy, Vantaa, Finland, is a manufacturer of industrial equipment for global markets. Beneq is oriented to production equipment which are designed for "chemistry at surfaces." Beneq acts as a business facilitator adding value for high-tech partner companies by converting proven innovations into industrial equipment.

For more information, please visit

MICRONOVA, is the leading research centre for micro- and nanotechnology in Finland, with research groups from the Helsinki University of Technology (TKK) and Technical Research Centre of Finland (VTT). The central research focus includes micro-, nano-, and optoelectronic devices, materials, sensors, microsystems and fabrication techniques.

For more information, please visit

Sampo Ahonen
+358 40 520 1090
+358 9 7599 5310

Copyright © Beneq

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