Nanotechnology Now - News Story: EUV microscope explores nanoscale

Home > News > EUV microscope explores nanoscale

June 27th, 2005

Abstract:
A team of US, Russian and Ukrainian scientists is using a table-top extreme ultraviolet (EUV) illumination source to create an optical microscope that can image features as small as 100 nm. Operating in reflection mode and requiring little sample preparation, the EUV microscope can rapidly characterize the topography of microelectronic circuits, lithography masks and other material surfaces.

Source:
nanotechweb

Bookmark:

Related News Press

Nanoelectronics

GLOBALFOUNDRIES Demonstrates 2.5D High-Bandwidth Memory Solution for Data Center, Networking, and Cloud Applications: Solution leverages 2.5D packaging with low-latency, high-bandwidth memory PHY built on FX-14™ ASIC design system August 9th, 2017

GLOBALFOUNDRIES, Silicon Mobility Deliver the Industry’s First Automotive FPCU to Boost Performance for Hybrid and Electric Vehicles: Silicon Mobility and GF’s 55nm LPx -enabled platform, with SST’s highly-reliable SuperFlash® memory technology, boosts automotive performance, ene August 3rd, 2017

Scientists discover new magnet with nearly massless charge carriers July 29th, 2017

Atomic discovery opens door to greener, faster, smaller electronic circuitry: Scientists find way to correct communication pathways in silicon chips, making them perfect July 27th, 2017

Announcements

Heating quantum matter: A novel view on topology: Physicists demonstrate how heating up a quantum system can be used as a universal probe for exotic states of matter August 22nd, 2017

A Tougher Tooth: A new dental restoration composite developed by UCSB scientists proves more durable than the conventional material August 22nd, 2017

Nagoya physicists resolve long-standing mystery of structure-less transition: Nagoya University-led team of physicists use a synchrotron radiation X-ray source to probe a so-called 'structure-less' transition and develop a new understanding of molecular conductors August 21st, 2017

Tokai University research: Nanomaterial wrap for improved tissue imaging August 21st, 2017

Tools

Tokai University research: Nanomaterial wrap for improved tissue imaging August 21st, 2017

Scientists from the University of Manchester and Diamond Light Source work with Deben to develop and test a new compression stage to study irradiated graphite at elevated temperatures August 15th, 2017

FRITSCH • Milling and Sizing! Innovations at POWTECH 2017 - Hall 2 • Stand 227 August 9th, 2017



Premium Products


	Only the news you want to read! Learn More


	University Technology Transfer & Patents Learn More


	Full-service, expert consulting Learn More




	The latest news from around the world, FREE