Nanotechnology Now - News Story: EUV microscope explores nanoscale

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June 27th, 2005

Abstract:
A team of US, Russian and Ukrainian scientists is using a table-top extreme ultraviolet (EUV) illumination source to create an optical microscope that can image features as small as 100 nm. Operating in reflection mode and requiring little sample preparation, the EUV microscope can rapidly characterize the topography of microelectronic circuits, lithography masks and other material surfaces.

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