Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Europe's IMEC to Use FEI's UltraView Tool Suite

Abstract:
UltraView Takes Manufacturers From Wafers to Atoms in Minutes While Keeping Production Wafers in the Fab

Europe's IMEC to Use FEI's UltraView(TM) Tool Suite in Process R&D Line

Hillsboro, OR | February 7, 2005

FEI Company (Nasdaq: FEIC) and IMEC, Europe's leading independent nano-electronics and nano-technology research center based in Leuven, Belgium, today announced that they have commenced a joint development project (JDP) for advanced metrology and analysis techniques for (sub)-45nm technologies.

The JDP will focus on providing ultra-high resolution process diagnostic information in a production environment in support of process development for 45nm and smaller technologies. IMEC will introduce a full suite of FEI's UltraView(TM) tools in its process R&D pilot line for these development efforts.

For the measurement of critical dimensions and analysis of layers and structures in the (sub)- 45 nm node, standard imaging and analysis methods will be no longer capable of providing sufficient information that chipmakers require to accurately analyze, predict and maximize yield and transistor performance. Metrology and chemical analysis with sub-nanometer resolution will be required to develop, ramp and produce these devices, while at the same time keeping to 18-24 month process development cycles. FEI's UltraView solution was designed to meet these challenges while also allowing product wafers to continue in the manufacturing process.

Ultraview gives access to site specific, sub-angstrom resolution for both metrology and chemical analysis of structures and layers both at the surface and subsurface, with fast time to result while preserving the wafer for further processing and analysis. UltraView makes use of FEI's most advanced tools for sample preparation and ultra-high resolution imaging and analysis, including FEI's in-fab Defect Analyzer(TM) 300 HP equipped with NanoLift(TM). Identified defects are rapidly milled and transferred to a sealed transfer capsule via a fully automated process. Wafers remain in the process flow as the sample, in its sealed environment, proceeds to the lab for thinning and advanced STEM and TEM analysis. Together, these tools deliver unmatched cost of ownership for next generation semiconductor fab processes.

About FEI Company:

FEI's Tools for Nanotech(TM), featuring focused ion- and electron-beam technologies, deliver 3D characterization, analysis and modification capabilities with resolution down to the sub-Angstrom level. With R&D centers in North America and Europe, and sales and service operations in more the 40 countries around the world, FEI is bringing the nanoscale within the grasp of leading researchers and manufacturers and helping to turn some of the biggest ideas of this century into reality. More information can be found on the FEI website at: www.feicompany.com.



Contact:
Dan Zenka, APR
Corporate Communications of FEI Company
+1-503-726-2695
dzenka@feico.com

Cathy van Mastrigt
Marketing Communications of FEI Company, Europe
+31-40-276.6225
cathy.van.mastrigt@feico.com

Copyright © FEI Company

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Investments/IPO's/Splits

180 Degree Capital Corp. Announces the Start of Kevin Rendino as Chairman and Chief Executive Officer and Completion of its Transition to a Registered Closed-End Fund March 31st, 2017

Harris & Harris Group Issues Its Financial Statements as of December 31, 2016, Posts Its Annual Shareholder Letter, And Will Host a Conference Call for Shareholders on Friday, March 17, 2017 March 15th, 2017

Harris & Harris Group Announces the Filing of Preliminary Proxy Materials Detailing Its Proposed Conversion From a BDC to a Registered Closed-End Fund January 24th, 2017

Harris & Harris Group Issues Reminder for Shareholder Update Call on January 10, 2017 January 10th, 2017

Chip Technology

Plasmon-powered upconversion nanocrystals for enhanced bioimaging and polarized emission: Plasmonic gold nanorods brighten lanthanide-doped upconversion superdots for improved multiphoton bioimaging contrast and enable polarization-selective nonlinear emissions for novel nanoscal May 19th, 2017

Oddball enzyme provides easy path to synthetic biomaterials May 17th, 2017

Racyics Launches ‘makeChip’ Design Service Platform for GLOBALFOUNDRIES’ 22FDX® Technology: Racyics will provide IP and design services as a part of the foundry’s FDXcelerator™ Partner Program May 11th, 2017

Researchers develop transistors that can switch between two stable energy states May 9th, 2017

Nanoelectronics

Oddball enzyme provides easy path to synthetic biomaterials May 17th, 2017

Racyics Launches ‘makeChip’ Design Service Platform for GLOBALFOUNDRIES’ 22FDX® Technology: Racyics will provide IP and design services as a part of the foundry’s FDXcelerator™ Partner Program May 11th, 2017

Researchers “iron out” graphene’s wrinkles: New technique produces highly conductive graphene wafers April 3rd, 2017

A big leap toward tinier lines: Self-assembly technique could lead to long-awaited, simple method for making smaller microchip patterns March 27th, 2017

Announcements

Zap! Graphene is bad news for bacteria: Rice, Ben-Gurion universities show laser-induced graphene kills bacteria, resists biofouling May 22nd, 2017

Leti Will Demo World’s-first WVGA 10-µm Pitch GaN Microdisplays for Augmented Reality Video at Display Week in Los Angles: Invited Paper also Will Present Leti’s Success with New Augmented Reality Technology That Reduces Pixel Pitch to Less than 5 Microns May 22nd, 2017

Sensors detect disease markers in breath May 19th, 2017

Graphene-nanotube hybrid boosts lithium metal batteries: Rice University prototypes store 3 times the energy of lithium-ion batteries May 19th, 2017

Tools

Plasmon-powered upconversion nanocrystals for enhanced bioimaging and polarized emission: Plasmonic gold nanorods brighten lanthanide-doped upconversion superdots for improved multiphoton bioimaging contrast and enable polarization-selective nonlinear emissions for novel nanoscal May 19th, 2017

The brighter side of twisted polymers: Conjugated polymers designed with a twist produce tiny, brightly fluorescent particles with broad applications May 16th, 2017

Racyics Launches ‘makeChip’ Design Service Platform for GLOBALFOUNDRIES’ 22FDX® Technology: Racyics will provide IP and design services as a part of the foundry’s FDXcelerator™ Partner Program May 11th, 2017

UnitySC Announces Wafer Thinning Inspection System; Win from Power Semiconductor IDM for Automotive: Leading IDM Selects New 4See Series Automated Defect Inspection Platform for Power Semiconductor Automotive Applications May 11th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project