Nanotechnology Now

Our NanoNews Digest Sponsors



Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Europe's IMEC to Use FEI's UltraView Tool Suite

Abstract:
UltraView Takes Manufacturers From Wafers to Atoms in Minutes While Keeping Production Wafers in the Fab

Europe's IMEC to Use FEI's UltraView(TM) Tool Suite in Process R&D Line

Hillsboro, OR | February 7, 2005

FEI Company (Nasdaq: FEIC) and IMEC, Europe's leading independent nano-electronics and nano-technology research center based in Leuven, Belgium, today announced that they have commenced a joint development project (JDP) for advanced metrology and analysis techniques for (sub)-45nm technologies.

The JDP will focus on providing ultra-high resolution process diagnostic information in a production environment in support of process development for 45nm and smaller technologies. IMEC will introduce a full suite of FEI's UltraView(TM) tools in its process R&D pilot line for these development efforts.

For the measurement of critical dimensions and analysis of layers and structures in the (sub)- 45 nm node, standard imaging and analysis methods will be no longer capable of providing sufficient information that chipmakers require to accurately analyze, predict and maximize yield and transistor performance. Metrology and chemical analysis with sub-nanometer resolution will be required to develop, ramp and produce these devices, while at the same time keeping to 18-24 month process development cycles. FEI's UltraView solution was designed to meet these challenges while also allowing product wafers to continue in the manufacturing process.

Ultraview gives access to site specific, sub-angstrom resolution for both metrology and chemical analysis of structures and layers both at the surface and subsurface, with fast time to result while preserving the wafer for further processing and analysis. UltraView makes use of FEI's most advanced tools for sample preparation and ultra-high resolution imaging and analysis, including FEI's in-fab Defect Analyzer(TM) 300 HP equipped with NanoLift(TM). Identified defects are rapidly milled and transferred to a sealed transfer capsule via a fully automated process. Wafers remain in the process flow as the sample, in its sealed environment, proceeds to the lab for thinning and advanced STEM and TEM analysis. Together, these tools deliver unmatched cost of ownership for next generation semiconductor fab processes.

About FEI Company:

FEI's Tools for Nanotech(TM), featuring focused ion- and electron-beam technologies, deliver 3D characterization, analysis and modification capabilities with resolution down to the sub-Angstrom level. With R&D centers in North America and Europe, and sales and service operations in more the 40 countries around the world, FEI is bringing the nanoscale within the grasp of leading researchers and manufacturers and helping to turn some of the biggest ideas of this century into reality. More information can be found on the FEI website at: www.feicompany.com.



Contact:
Dan Zenka, APR
Corporate Communications of FEI Company
+1-503-726-2695
dzenka@feico.com

Cathy van Mastrigt
Marketing Communications of FEI Company, Europe
+31-40-276.6225
cathy.van.mastrigt@feico.com

Copyright © FEI Company

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Investments/IPO's/Splits

PEN Inc. Announces New Trading Symbol: PENC: Stock Continues Trading on the OTCQB September 3rd, 2014

Aspen Aerogels, Inc. to Present at Barclays CEO Energy-Power Conference August 27th, 2014

Harris & Harris Group Letter to Shareholders on Website August 19th, 2014

Harris & Harris Group to Host Conference Call on Second-Quarter 2014 Financial Results on August 15, 2014 August 12th, 2014

Chip Technology

Toward optical chips: A promising light source for optoelectronic chips can be tuned to different frequencies September 19th, 2014

IEEE International Electron Devices Meeting To Celebrate 60th Anniversary as The Leading Technical Conference for Advanced Semiconductor Devices September 18th, 2014

‘Small’ transformation yields big changes September 16th, 2014

Researchers Create World’s Largest DNA Origami September 11th, 2014

Nanoelectronics

Rice rolls 'neat' nanotube fibers: Rice University researchers' acid-free approach leads to strong conductive carbon threads September 15th, 2014

Excitonic Dark States Shed Light on TMDC Atomic Layers: Berkeley Lab Discovery Holds Promise for Nanoelectronic and Photonic Applications September 11th, 2014

Researchers Create World’s Largest DNA Origami September 11th, 2014

Material development on the nanoscale: Doped graphene nanoribbons with potential September 8th, 2014

Announcements

Toward optical chips: A promising light source for optoelectronic chips can be tuned to different frequencies September 19th, 2014

New research points to graphene as a flexible, low-cost touchscreen solution September 19th, 2014

FEI Opens New Technology Center in Czech Republic: FEI expands its presence in Brno with the opening of a new, larger facility September 18th, 2014

Biosensors Get a Boost from Graphene Partnership: $5 Million Investment Supports Dozens of Jobs and Development of 300mm Fabrication Process and Wafer Transfer Facility September 18th, 2014

Tools

IEEE International Electron Devices Meeting To Celebrate 60th Anniversary as The Leading Technical Conference for Advanced Semiconductor Devices September 18th, 2014

FEI Opens New Technology Center in Czech Republic: FEI expands its presence in Brno with the opening of a new, larger facility September 18th, 2014

New NPZ100-403 Piezo Stage from nPoint Inc. September 17th, 2014

Researchers Create World’s Largest DNA Origami September 11th, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE