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Home > News > Canon to Introduce Stepper for Mass Production of 65-Nano Chips

December 9th, 2004

Canon to Introduce Stepper for Mass Production of 65-Nano Chips

Abstract:
Canon's new steppers, which are optical gear used to etch computer-chip circuits onto silicon wafers, can mass-produce 65- nanometer chips and may go into production in 2007 or 2008, Hiroshi Matsumoto, a manager at the Tokyo-based company's semiconductor planning division, said in an interview Friday.

Source:
bloomberg.com

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