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Home > News > Tegal Receives Order for 980ACS Series Plasma Etch System

November 18th, 2004

Tegal Receives Order for 980ACS Series Plasma Etch System

Abstract:
Tegal Corporation today announced that a leading European analog and mixed signal device manufacturer has placed an order for a Tegal 980ACS (Advanced Control System) plasma etch system that will be used for high-volume fabrication in its new 200 mm production facility.

Source:
businesswire

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