Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > News > Immersion effort looks to new crystals, liquids

September 15th, 2004

Immersion effort looks to new crystals, liquids

Abstract:
Adopting immersion lithography appears at this point to be nearly pain-free: Just add water and, voila, those 193nm tools can be pushed well past their expected life. But taking immersion even further, to a half-pitch of 45nm and beyond, will mean more than just adding fluids with a higher refractive index, leading lithographers maintain.

Source:
EETimes

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Tools

New method enables high-resolution measurements of magnetism February 7th, 2018

Nanometrics Selected for Fab-Wide Process Control Metrology by Domestic China 3D-NAND Manufacturer: Latest Fab Win Includes Comprehensive Suite for Substrate, Thin Film and Critical Dimension Metrology February 7th, 2018

A new radiation detector made from graphene: A new bolometer exploits the thermoelectric properties of graphene February 6th, 2018

Measuring the temperature of two-dimensional materials at the atomic level February 3rd, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project