Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > News > Immersion effort looks to new crystals, liquids

September 15th, 2004

Immersion effort looks to new crystals, liquids

Abstract:
Adopting immersion lithography appears at this point to be nearly pain-free: Just add water and, voila, those 193nm tools can be pushed well past their expected life. But taking immersion even further, to a half-pitch of 45nm and beyond, will mean more than just adding fluids with a higher refractive index, leading lithographers maintain.

Source:
EETimes

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Tools

Graphene brings quantum effects to electronic circuits January 22nd, 2015

EnvisioNano: An image contest hosted by the National Nanotechnology Initiative (NNI) January 22nd, 2015

New Molecular Beam Epitaxy deposition equipment at the ICN2 January 22nd, 2015

New method to generate arbitrary optical pulses January 21st, 2015

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2015 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE