Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > News > 'Solid immersion' probed for maskless litho

September 14th, 2004

'Solid immersion' probed for maskless litho

Abstract:
The current craze in lithography is immersion technology. But researchers from the University of Arizona have put a new twist on the technology, by devising so-called "solid immersion." In a paper at the Bacus Symposium for Photomask Technology, the University of Arizona is expected to describe the means of enabling maskless lithography, by using "solid immersion lens nano-probes."

Source:
EETimes

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Chip Technology

Semiliquid chains pulled out of a sea of microparticles July 20th, 2017

A firefly's flash inspires new nanolaser light July 18th, 2017

GLOBALFOUNDRIES and VeriSilicon To Enable Single-Chip Solution for Next-Gen IoT Networks: Integrated solution leverages GFs 22FDX technology to decrease power, area, and cost for NB-IoT and LTE-M applications July 14th, 2017

Nanometrics to Announce Second Quarter Financial Results on August 1, 2017 July 14th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project