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Home > News > Bell Labs, ASML to bring maskless litho to market

September 11th, 2004

Bell Labs, ASML to bring maskless litho to market

Abstract:
A group led by Bell Labs and AMSL Holding NV claims to have made a major breakthrough in maskless lithography that could eventually bring the technology into production fabs.

Lucent Technologies Inc.'s Bell Labs unit, along with ASML and others, have been selected by the Defense Advanced Research Projects Agency (DARPA) to develop a maskless optical lithography tool for aerospace, military and related applications.

Source:
* SiliconStrategies

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