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May 31st, 2004

For metrology, nano changes everything

Abstract:
One can classify the characterization and metrology requirements for ICs beyond the 65nm node as the measurement of nanoelectronics. Two interesting aspects to future measurement needs are feature size and number. According to the International Technology Roadmap for Semiconductors, the transistor gate length of microprocessors at the 45nm node will be less than 20nm in 2010 and will shrink to less than 10nm for the 22nm node in 2016. A memory device at the 45nm node will have about 1.7 billion transistors; a logic device will have slightly more than 300 million transistors.

Source:
* EETimes

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