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Home > News > Tegal Completes Agreement to Purchase Assets of Simplus Systems

December 15th, 2003

Tegal Completes Agreement to Purchase Assets of Simplus Systems

Abstract:
Tegal Corporation a leading designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits, today announced that it had completed the purchase of the assets of Simplus Systems Corporation, developer of a unique Nano Layer Deposition cluster tool and processes for barrier, copper seed and high-K dielectric applications.

Source:
Businesswire

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