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Home > News > New electron microscope enhances semiconductor analysis

December 10th, 2003

New electron microscope enhances semiconductor analysis

Abstract:
Offering improved resolution and significantly enhanced capabilities for semiconductor applications, Hitachi has introduced the HD-2300 scanning transmission electron microscope (STEM). The new instrument features a Schottky-type field emission source and has STEM resolution of 0.204 nm at an accelerating voltage of 200 kV.

Source:
electropages

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