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Home > News > Forging nanochannels without nanolithography

October 2nd, 2003

Forging nanochannels without nanolithography

Abstract:
Scientists from the California Institute of Technology, US, have come up with a way of making nanochannels without using nanolithography. The process employs basic CMOS fabrication techniques such as chemical-mechanical polishing and thermal oxidation.

Source:
Nanotechweb

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