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Home > News > Bacteria protein yields nanometer photomasks

September 16th, 2003

Bacteria protein yields nanometer photomasks

Abstract:
Using protein membranes as etch masks, a team at the University of Colorado, Boulder, has found what they believe is a practical route to creating precise nanocluster arrays at dimensions of around 10 nanometers. The method beats current lithographic techniques by a factor of 10 and is more precise than electron-beam methods, which also have the drawback of slow serial definition of features.

Source:
EETimes

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