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Home > News > MEMS and the mask muddle: small isn't cheap

July 11th, 2003

MEMS and the mask muddle: small isn't cheap

As silicon chip features get smaller, the cost of making the masks that print them is exploding. At 90 nanometers, the next step down for chip makers, a set of masks costs $1.5 million. At the step beyond that, 65 nanometers, those masks will probably cost about $4 million. And a single chip can use 20 or more masks.


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