Home > News > Ultratech rolls out metrology tool for MEMS, ICs
June 18th, 2003
Ultratech rolls out metrology tool for MEMS, ICs
Ultratech entered the metrology market with a tool designed for semiconductor and nanotechnology applications. The new UltraMet 100 is a metrology system designed to measure any, or every, die on a wafer, providing full-wafer validation of Ultratech's Nanotech 160 dual-side-alignment stepper. The tool is designed for chip and MEMS systems.
Reshaping the solar spectrum to turn light to electricity: UC Riverside researchers find a way to use the infrared region of the sun's spectrum to make solar cells more efficient July 27th, 2015
Superfast fluorescence sets new speed record: Plasmonic device has speed and efficiency to serve optical computers July 27th, 2015
Ultra-thin hollow nanocages could reduce platinum use in fuel cell electrodes July 24th, 2015
Deben reports on the use of their CT500 in the X-ray microtomography laboratory at La Trobe University, Melbourne, Australia July 22nd, 2015