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June 18th, 2003
Ultratech rolls out metrology tool for MEMS, ICs
Ultratech entered the metrology market with a tool designed for semiconductor and nanotechnology applications. The new UltraMet 100 is a metrology system designed to measure any, or every, die on a wafer, providing full-wafer validation of Ultratech's Nanotech 160 dual-side-alignment stepper. The tool is designed for chip and MEMS systems.
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