Home > News > Lab claims world's best MEMS sensor
June 12th, 2003
Lab claims world's best MEMS sensor
Measuring just 2 microns long by 50 nanometers thick, the silicon cantilevers--like the teeth of a comb--were vibrated by an inexpensive diode laser. Measurements of the frequency of oscillation confirmed that the sensor had detected just 5.5 femtograms.
Leti Announces MEMS Research Collaboration with OMRON November 28th, 2013
Columbia engineers make world's smallest FM radio transmitter: Team demonstrates new application of graphene using positive feedback November 18th, 2013
Revisiting quantum effects in MEMS: New calculations shows that the influence of quantum effects on the operating conditions of nanodevices has, until now, been overestimated November 15th, 2013
MEMS Industry Group's Annual Executive Conference Shows Why MEMS Is Growing 2x Faster Than Semiconductors: MEMS Executive Congress US 2013 Sets Attendance Record, Honors 'MEMS Innovation' Award Winners, Crowns MEMS Technology Showcase Favorites November 14th, 2013