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Home > News > ASML, Canon, Nikon take dip into immersion litho

February 28th, 2003

ASML, Canon, Nikon take dip into immersion litho

Abstract:
ASML Holding NV, Canon Inc., and Nikon Corp. separately disclosed they are taking the first steps in what could be the next "breakthrough" in chip production: immersion lithography.

Source:
EETimes

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