Nanotechnology Now

Our NanoNews Digest Sponsors


Heifer International

Wikipedia Affiliate Button


DHgate

Home > News > Stitching accuracy key to Nikon's EPL prototype

February 14th, 2003

Stitching accuracy key to Nikon's EPL prototype

Abstract:
Nikon Corp. said it was a breakthrough in sub-field stitching accuracy that allowed the creation of a prototype of its electron-beam projection lithography (EPL) system. The sub-field stitching accuracy, which governs how well a complete die is characterized by several sub-field e-beam exposures, has been described as the main hurdle facing the development of EPL.

Source:
* SiliconStrategies

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Chip Technology

New, better way to build circuits for world's first useful quantum computers June 28th, 2016

GraphExeter illuminates bright new future for flexible lighting devices June 23rd, 2016

Soft decoupling of organic molecules on metal June 23rd, 2016

Particle zoo in a quantum computer: First experimental quantum simulation of particle physics phenomena June 23rd, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic