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Home > News > Ultraviolet Lithography

February 14th, 2003

Ultraviolet Lithography

Abstract:
Ultraviolet lithography can produce lines for integrated circuits as small as 39 nm in one recent test. To help sustain Moore's law and cram more and more gates and memory units into a given space, manufacturers of microchips must make the lines in their circuitry ever smaller.

Source:
AIP

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