Nanotechnology Now

Our NanoNews Digest Sponsors
Heifer International



Home > Press > RIT researchers improve fabrication process of nano-structures for electronic devices: Use of indium gallium phosphide with I-MacEtch processing shows promise for more cost effective fabrication and increased performance in devices from photonics to telecommunications

University Web Services

Semiconductor devices are created on wafers through a multi-step process to coat, remove or pattern conductive materials.
University Web Services Semiconductor devices are created on wafers through a multi-step process to coat, remove or pattern conductive materials.

Abstract:
Researchers at RIT have found a more efficient fabricating process to produce semiconductors used in today’s electronic devices. They also confirmed that materials other than silicon can be used successfully in the development process that could increase performance of electronic devices. This fabrication process—the I-MacEtch, or inverse metal-assisted chemical etching method—can help meet the growing demand for more powerful and reliable nano-technologies needed for solar cells, smartphones, telecommunications grids and new applications in photonics and quantum computing.

RIT researchers improve fabrication process of nano-structures for electronic devices: Use of indium gallium phosphide with I-MacEtch processing shows promise for more cost effective fabrication and increased performance in devices from photonics to telecommunications

Rochester, NY | Posted on March 20th, 2018

“What is novel about our work is that for the first time we are looking at applying I-MacEtch processing to indium-gallium-phosphide materials. I-MacEtch is an alternative to two conventional approaches and is a technique that has been used in the field—but the materials that have been explored are fairly limited,” said Parsian Mohseni, assistant professor of microsystems engineering in RIT’s Kate Gleason College of Engineering. He is also director of the EINS Laboratory at the university.

Demands for improved computer processing power have led researchers to explore both new processes and other materials beyond silicon to produce electronic components, Mohseni explained. The I-MacEtch process combines the benefits of two traditional methods—wet etching and reactive ion etching, or REI. Indium-gallium-phosphide is one of several materials being tested to complement silicon as a means to improve current capacity of semiconductor processing.

“This is a very well-known material and has applications in the electronics and solar cell industries,” he said. “We are not re-inventing the wheel; we are establishing new protocols for treating the existing material that is more cost effective, and a more sustainable process.”

Semiconductor devices are created on wafers through a multi-step process to coat, remove or pattern conductive materials. Traditional processes are wet etch, where a sample with blocked aspects is immersed in an acid bath to remove substances, and reactive ion etching, where ions bombard exposed surfaces on the wafer to change its chemical properties and remove materials in those exposed regions. Both have been used to develop the intricate electronic patterns on circuits and use silicon as a foundation for this type of patterning. Improving patterning methods by I-MacEtch could mean reducing fabrication complexity of various photonic and electronic devices.

Researchers and semiconductor fabrication scientists have been using MacEtch extensively for processing silicon. At the same time, assessments of other materials in the III-V range of individual elements that may be conducive to this same type of fabrication with similar advantages are underway. In his research, Mohseni is also looking at different alloys of those III-V materials, namely the ternary alloys such as indium-gallium-phosphide (InGaP).

The research detailed in the upcoming issue of the American Chemical Society’s Applied Materials and Interfaces journal highlights how the nanofabrication methodology was applied to InGaP and how it can impact the processing of device applications and generation of high aspect ratio and nano-scale semiconductor features, said Thomas Wilhelm, a microsystems engineering doctoral student and first-author of the paper. The novel processing method can be significant in the development of ordered arrays of high aspect ratio structures such as nanowires.

For solar cells, the goal is to minimize the cost-to-power-produced ratio, and if it is possible to lower the cost of making the cell, and increasing the efficiency of it, this improves the device overall. Exploring new methods of fabricating the existing, relevant materials in a way that allows for faster, less expensive and more controlled processing by combining the benefits of wet etching and RIE has been the focus of Mohseni’s work. The improved process means avoiding expensive, bulky, hazardous processing methods.

“We are using a simple benchtop set up and we end up with very similar structures; in fact, one can argue that they are higher in quality than the structures that we can generate with RIE for a fraction of the cost and with less time, less steps throughout, without the higher temperature conditions or expensive instrumentation,” he said.

####

About Rochester Institute of Technology
Rochester Institute of Technology is home to leading creators, entrepreneurs, innovators and researchers. Founded in 1829, RIT enrolls about 19,000 students in more than 200 career-oriented and professional programs, making it among the largest private universities in the U.S.

The university is internationally recognized and ranked for academic leadership in business, computing, engineering, imaging science, liberal arts, sustainability, and fine and applied arts. RIT also offers unparalleled support services for deaf and hard-of-hearing students. The cooperative education program is one of the oldest and largest in the nation. Global partnerships include campuses in China, Croatia, Dubai and Kosovo.

For news, photos and videos, go to www.rit.edu/news.

For more information, please click here

Contacts:
Michelle Cometa
585-475-4954

Copyright © Rochester Institute of Technology

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Researchers develop artificial building blocks of life March 8th, 2024

How surface roughness influences the adhesion of soft materials: Research team discovers universal mechanism that leads to adhesion hysteresis in soft materials March 8th, 2024

Two-dimensional bimetallic selenium-containing metal-organic frameworks and their calcinated derivatives as electrocatalysts for overall water splitting March 8th, 2024

Curcumin nanoemulsion is tested for treatment of intestinal inflammation: A formulation developed by Brazilian researchers proved effective in tests involving mice March 8th, 2024

Nanofabrication

New chip opens door to AI computing at light speed February 16th, 2024

Researchers develop technique to synthesize water-soluble alloy nanoclusters January 12th, 2024

Wireless/telecommunications/RF/Antennas/Microwaves

HKUST researchers develop new integration technique for efficient coupling of III-V and silicon February 16th, 2024

Optical-fiber based single-photon light source at room temperature for next-generation quantum processing: Ytterbium-doped optical fibers are expected to pave the way for cost-effective quantum technologies November 3rd, 2023

Chip-based dispersion compensation for faster fibre internet: SUTD scientists developed a novel CMOS-compatible, slow-light-based transmission grating device for the dispersion compensation of high-speed data, significantly lowering data transmission errors and paving the way for June 30th, 2023

Possible Futures

Two-dimensional bimetallic selenium-containing metal-organic frameworks and their calcinated derivatives as electrocatalysts for overall water splitting March 8th, 2024

Curcumin nanoemulsion is tested for treatment of intestinal inflammation: A formulation developed by Brazilian researchers proved effective in tests involving mice March 8th, 2024

The Access to Advanced Health Institute receives up to $12.7 million to develop novel nanoalum adjuvant formulation for better protection against tuberculosis and pandemic influenza March 8th, 2024

Nanoscale CL thermometry with lanthanide-doped heavy-metal oxide in TEM March 8th, 2024

Chip Technology

New chip opens door to AI computing at light speed February 16th, 2024

HKUST researchers develop new integration technique for efficient coupling of III-V and silicon February 16th, 2024

Electrons screen against conductivity-killer in organic semiconductors: The discovery is the first step towards creating effective organic semiconductors, which use significantly less water and energy, and produce far less waste than their inorganic counterparts February 16th, 2024

NRL discovers two-dimensional waveguides February 16th, 2024

Quantum Computing

Researchers’ approach may protect quantum computers from attacks March 8th, 2024

Physicists ‘entangle’ individual molecules for the first time, hastening possibilities for quantum information processing: In work that could lead to more robust quantum computing, Princeton researchers have succeeded in forcing molecules into quantum entanglement December 8th, 2023

World’s first logical quantum processor: Key step toward reliable quantum computing December 8th, 2023

Optical-fiber based single-photon light source at room temperature for next-generation quantum processing: Ytterbium-doped optical fibers are expected to pave the way for cost-effective quantum technologies November 3rd, 2023

Optical computing/Photonic computing

Optically trapped quantum droplets of light can bind together to form macroscopic complexes March 8th, 2024

New chip opens door to AI computing at light speed February 16th, 2024

HKUST researchers develop new integration technique for efficient coupling of III-V and silicon February 16th, 2024

NRL discovers two-dimensional waveguides February 16th, 2024

Nanoelectronics

Interdisciplinary: Rice team tackles the future of semiconductors Multiferroics could be the key to ultralow-energy computing October 6th, 2023

Key element for a scalable quantum computer: Physicists from Forschungszentrum Jülich and RWTH Aachen University demonstrate electron transport on a quantum chip September 23rd, 2022

Reduced power consumption in semiconductor devices September 23rd, 2022

Atomic level deposition to extend Moore’s law and beyond July 15th, 2022

Discoveries

What heat can tell us about battery chemistry: using the Peltier effect to study lithium-ion cells March 8th, 2024

Researchers’ approach may protect quantum computers from attacks March 8th, 2024

High-tech 'paint' could spare patients repeated surgeries March 8th, 2024

Nanoscale CL thermometry with lanthanide-doped heavy-metal oxide in TEM March 8th, 2024

Announcements

What heat can tell us about battery chemistry: using the Peltier effect to study lithium-ion cells March 8th, 2024

Curcumin nanoemulsion is tested for treatment of intestinal inflammation: A formulation developed by Brazilian researchers proved effective in tests involving mice March 8th, 2024

The Access to Advanced Health Institute receives up to $12.7 million to develop novel nanoalum adjuvant formulation for better protection against tuberculosis and pandemic influenza March 8th, 2024

Nanoscale CL thermometry with lanthanide-doped heavy-metal oxide in TEM March 8th, 2024

Interviews/Book Reviews/Essays/Reports/Podcasts/Journals/White papers/Posters

Researchers develop artificial building blocks of life March 8th, 2024

How surface roughness influences the adhesion of soft materials: Research team discovers universal mechanism that leads to adhesion hysteresis in soft materials March 8th, 2024

Curcumin nanoemulsion is tested for treatment of intestinal inflammation: A formulation developed by Brazilian researchers proved effective in tests involving mice March 8th, 2024

Nanoscale CL thermometry with lanthanide-doped heavy-metal oxide in TEM March 8th, 2024

Energy

Development of zinc oxide nanopagoda array photoelectrode: photoelectrochemical water-splitting hydrogen production January 12th, 2024

Shedding light on unique conduction mechanisms in a new type of perovskite oxide November 17th, 2023

Inverted perovskite solar cell breaks 25% efficiency record: Researchers improve cell efficiency using a combination of molecules to address different November 17th, 2023

The efficient perovskite cells with a structured anti-reflective layer – another step towards commercialization on a wider scale October 6th, 2023

Photonics/Optics/Lasers

Nanoscale CL thermometry with lanthanide-doped heavy-metal oxide in TEM March 8th, 2024

Optically trapped quantum droplets of light can bind together to form macroscopic complexes March 8th, 2024

HKUST researchers develop new integration technique for efficient coupling of III-V and silicon February 16th, 2024

A battery’s hopping ions remember where they’ve been: Seen in atomic detail, the seemingly smooth flow of ions through a battery’s electrolyte is surprisingly complicated February 16th, 2024

Solar/Photovoltaic

Development of zinc oxide nanopagoda array photoelectrode: photoelectrochemical water-splitting hydrogen production January 12th, 2024

Shedding light on unique conduction mechanisms in a new type of perovskite oxide November 17th, 2023

Inverted perovskite solar cell breaks 25% efficiency record: Researchers improve cell efficiency using a combination of molecules to address different November 17th, 2023

Charged “molecular beasts” the basis for new compounds: Researchers at Leipzig University use “aggressive” fragments of molecular ions for chemical synthesis November 3rd, 2023

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project